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Bodo Kalkofen

Observed names: B. Kalkofen, BODO KALKOFEN, Kalkofen, Bodo
ORCID: 0000-0002-5250-7992
Observed ORCID: 0000-0002-5250-7992
OpenAlex ID: A5006019093
Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
2016 · Chia-Pin Yeh, Marco Lisker, et al. · AIP Advances · 29
Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
2015 · Bodo Kalkofen, Akinwumi A. Amusan, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 23
Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
2015 · Akinwumi A. Amusan, Bodo Kalkofen, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 22
Self-Intercalation as Origin of High-Temperature Ferromagnetism in Epitaxially Grown Fe 5 GeTe 2 Thin Films
2024 · M. Silinskas, S. Senz, et al. · Physical Review Letters · 21
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Investigation of strontium tantalate thin films for high-k gate dielectric applications
2006 · M. Silinskas, M. Lisker, et al. · Materials Science in Semiconductor Processing · 14
Application of atomic layer deposited dopant sources for ultra‐shallow doping of silicon
2013 · Bodo Kalkofen, Akinwumi A. Amusan, et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 13
Atomic Layer Deposition of the Conductive Delafossite PtCoO2
2022 · Dirk J. Hagen, Jiho Yoon, et al. · Advanced Materials Interfaces · 12
Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine
2005 · Bodo Kalkofen, Marco Lisker, et al. · Materials Science and Engineering B · 11
P-type Doping of Silicon Suitable for Structures with High Aspect Ratios by Using a Dopant Source of Boron Oxide Grown by Atomic Layer Deposition
2012 · Bodo Kalkofen, Venu Madhav Mothukuru, et al. · ECS Transactions · 10
Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
2019 · Svetlana Beljakowa, Peter Pichler, et al. · physica status solidi (a) · 8
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Hot Wire Chemical Vapor Deposition of Ge[sub 2]Sb[sub 2]Te[sub 5] Thin Films
2011 · D. Reso, M. Silinskas, et al. · Journal of The Electrochemical Society · 8
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A simple two-step phosphorus doping process for shallow junctions by applying a controlled adsorption and a diffusion in an oxidising ambient
2004 · Bodo Kalkofen, Marco Lisker, et al. · Materials Science and Engineering B · 8
Atomic layer deposition of phosphorus oxide films as solid sources for doping of semiconductor structures
2018 · Bodo Kalkofen, Basheer Ahmed, et al. · IEEE International Conference on Nanotechnology (IEEE-NANO) · 7
High temperature reactive ion etching of iridium thin films with aluminum mask in CF4/O2/Ar plasma
2016 · Chia-Pin Yeh, Marco Lisker, et al. · AIP Advances · 7
Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
2019 · Seunghun Baik, Hyeokjin Kwon, et al. · IEEE Electron Device Letters · 6
Deposition of Iridium Thin Films on Three‐Dimensional Structures With PE‐MOCVD
2015 · Chia‐Pin Yeh, Marco Lisker, et al. · Chemical Vapor Deposition · 6
MOCVD kinetics of strontium bismuth tantalate thin film growth
2004 · Mindaugas Šilinskas, Marco Lisker, et al. · Lithuanian Journal of Physics · 6
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Investigation of Antimony Oxide Films Deposited by Atomic Layer Deposition
2012 · Bodo Kalkofen, Venu Madhav Mothukuru, et al. · ECS Transactions · 5
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Atomic Layer Deposition of Antimony Oxide on Hydrogen-terminated Silicon Substrates
2009 · Bodo Kalkofen, Serhiy Matichyn, et al. · ECS Transactions · 5
Enhanced ferroelectric properties of multilayer SBT-BTN thin films for NVRAM applications
2016 · O. Khorkhordin, C. P. Yeh, et al. · Integrated ferroelectrics · 4
Investigation of oxide thin films deposited by atomic layer deposition as dopant source for ultra-shallow doping of silicon
2013 · Bodo Kalkofen, Akinwumi A. Amusan, et al. · Microelectronic Engineering · 4
EVALUATION OF DIFFERENT METALORGANIC PRECURSORS FOR Ge-Sb-Te THIN FILM DEPOSITION
2009 · DENIS RESO, MINDAUGAS SILINSKAS, et al. · Integrated ferroelectrics · 4
Enhanced Ferroelectric Properties of Multilayer SBT-BTN Thin Films for NVRAM Applications
2015 · Oleksandr Khorkhordin, Chia-Pin Yeh, et al. · Journal of Crystallization Process and Technology · 3
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Epitaxial growth of Si nanowires by a modified VLS method using molten Ga as growth assistant
2008 · Annika Gewalt, Bodo Kalkofen, et al. · MRS Proceedings · 3
Enhancing phosphorous doping level on Ge by Sb co-doping with non-beamline implantation methods
2018 · Chuck Paeng, He Zhang, et al. · International Workshop on Junction Technology · 2
Works count: 49
Citation count: 254
H-index: 9
I10-index: 9
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