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Martin Drost
Observed name:
M. Drost
Institution:
Leibniz Institute for High Performance Microelectronics
Observed institution:
Leibniz Institute for High Performance Microelectronics
OpenAlex ID:
A5007965069
Monolithic Integration of a Wafer-Level Thin-Film Encapsulated mm-Wave RF-MEMS Switch in BEOL of a 130-nm SiGe BiCMOS Technology
2022
·
Alexander Göritz
, Selin Tolunay Wipf
, et al.
·
IEEE Transactions on Components Packaging and Manufacturing Technology
·
9
PDF
SiGe-BiCMOS Technology with 500 GHz f T and 610 GHz f MAX
2025
·
H. Rücker
, B. Heinemann
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
2
Tungsten grid enhanced thin-film wafer-level encapsulation for monolithically integrated D-Band RF-MEMS switches in a 130 nm BiCMOS technology
2022
·
Alexander Göritz
, Selin Tolunay Wipf
, et al.
·
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
·
1
BiCMOS BEOL Coupon Fabrication and Micro Transfer Printing for Heterogeneous Integration Applications
2024
·
Selin Tolunay Wipf
, Steffen Marschmeyer
, et al.
·
Electronics System-Integration Technology Conference (ESTC)
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Works count:
4
Citation count:
11
H-index:
1
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