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Author

Yuya Hirai

Observed name: Y. Hirai
ORCID: 0000-0002-6557-6065
Observed ORCID: 0000-0002-6557-6065
OpenAlex ID: A5009934592
IMPHEAT-II, a novel high temperature ion implanter for mass production of SiC power devices
2022 · Yusuke Kuwata, Shiro Shiojiri, et al. · MRS Advances · 7
IMPHEAT-II:In situ XRD system, enhancement of implantation angle accuracy through per-wafer measurement of off-axis angle for channeling implantation
2025 · Y. Hirai, H. Ide, et al. · MRS Advances · 5
High Precision Direct Transfer Bonding for Submicron Die-to-Wafer in 3D/Heterogeneous Integration
2024 · Ichiro Sano, Katsuya Yamada, et al. · Electronic System-Integration Technology Conference (ESTC) · 4
IMPHEAT-II: A novel ion source with extended lifetime and wide beam current dynamic range for SiC power device mass production
2025 · Yuta Iwanami, Yuya Hirai, et al. · MRS Advances · 1
New control system of the multiple filaments in the large ion source for ion doping system iG6 Ver.2
2022 · Yuya Hirai, Kenji Watari, et al. · MRS Advances · 1
An advantage of the use of XRD apparatus embedded in IMPHEAT-II for SiC device fabrication using channeling implants
2025 · Shinkichi Hamada, Yuya Hirai, et al. · IEEE Workshop on Wide Bandgap Power Devices and Applications
Works count: 6
Citation count: 18
H-index: 3
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