2025 · Hiroaki Kai, Yoshiro Igarashi, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1

Space charge neutralization system for low-energy high-current implanter

2025 · Taido Kurauchi, Hiroaki Kai, et al. · MRS Advances · 1

The Investigation of Material Modification for SiO2, Si3N4 Film and Photo-resist using High-Dose Ion Implantation Technique

2020 · R. Wada, H. Kai, et al. · IEEE Electron Devices Technology & Manufacturing Conference (EDTM) · 1

Surface modification of SiO 2 thin film using high-dose ion implantation technique as a suitable manufacturing process

2019 · Ryota Wada, Hiroaki Kai, et al. · Japanese Journal of Applied Physics · 1

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Improved Multi-Cusp Ion Source to Efficiently Extract B+ Beam and PHx+ Beam

2016 · Hiroaki Kai, Ippei Nishimura, et al. · International Conference on Ion Implantation Technology · 1

New operation method for ion source parameters to improve single ionization efficiency

2025 · Hiroaki Kai, Yuya Uchida, et al. · MRS Advances

Surface Modification of SiO2 Thin Film using High-Dose Ion Implantation Technique as a Manufacturing Worthy Process

2019 · R. Wada, H. Kai, et al. · International Conference on Solid State Devices and Materials (SSDM)

Works count: 14

Citation count: 56

H-index: 5

I10-index: 2