Author

Kaiping Feng

Observed name: FENG Kaiping

Institutions: Quzhou University, Zhejiang University of Technology

Observed institutions: Shandong University, Quzhou University, Zhejiang University of Technology, Zhejiang University

ORCID: 0000-0003-1317-327X

Observed ORCID: 0000-0003-1317-327X

OpenAlex ID: A5018741817

Polishing performance and material removal mechanism in the solid-phase Fenton reaction based polishing process of SiC wafer using diamond gel disc

2024 · Lanxing Xu, Kaiping Feng, et al. · Journal of Materials Processing Technology · 26

Investigation the CMP process of 6 H-SiC in H2O2 solution with ReaxFF molecular dynamics simulation

2025 · Yanzhang Gu, Kaiping Feng, et al. · Scientific Reports · 22

Fabrication and Application of Gel-Forming CeO2 Fixed Abrasive Tools for Quartz Glass Polishing

2022 · Kaiping Feng, Binghai Lyu, et al. · International Journal of Precision Engineering and Manufacturing · 22

Ultra-precision grinding of 4H-SiC wafer by PAV/PF composite sol-gel diamond wheel

2021 · Kaiping Feng, Tianchen Zhao, et al. · Advances in Mechanical Engineering · 19

Contrast Experiments in Dielectrophoresis Polishing (DEPP)/Chemical Mechanical Polishing (CMP) of Sapphire Substrate

2019 · Tianchen Zhao, Julong Yuan, et al. · Applied Sciences · 14

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Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer

2020 · Tianchen Zhao, Qianfa Deng, et al. · Micromachines · 13

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Chemical Mechanical Polishing for Monocrystal SiC Assisted by the Heterogeneous Sono-Fenton Oxidation

2024 · Dong Shi, Tao Yin, et al. · ECS Journal of Solid State Science and Technology · 10

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Study on material removal mechanism of solid phase Fenton catalytic polishing of SiC wafer with gel-forming abrasive disc

2025 · Kaiping Feng, Lanxing Xu, et al. · Materials Science in Semiconductor Processing · 8

Material removal mechanism in Fenton based AlN ceramic substrate polishing process

2024 · Liang Zhao, Kaiping Feng, et al. · Ceramics International · 8

Study on the Fabrication and Grinding Performance of the Self-sharpening Cr2O3 Gel Abrasive Tool

2024 · Kaiping Feng, Liang Zhao, et al. · International Journal of Precision Engineering and Manufacturing · 8

Fabrication and Application of Gel Forming Ultrafine Diamond Abrasive Tools

2021 · Kaiping Feng, Binghai Lyu, et al. · ECS Journal of Solid State Science and Technology · 8

Double-curved disc ultrasonic-assisted lapping of precision-machined crowned rollers

2018 · Meipeng Zhong, Julong Yuan, et al. · The International Journal of Advanced Manufacturing Technology · 8

Insight into mechanism of Friction-enhanced chemical behavior in AlN ceramic polishing process

2025 · Liang Zhao, Mingfeng Ke, et al. · Applied Surface Science · 6

Experimental Study of Both-Sides Cylindrical Roller Machining Based on Ceramic Plate

2022 · Tianchen Zhao, Junkai Ding, et al. · Lubricants · 6

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Experimental study on the influence of lapping plate materials on the quality of both sides cylindrical rollers machining

2025 · Tianchen Zhao, Jiahong Ruan, et al. · Scientific Reports · 5

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Study of ReaxFF molecular dynamics simulation about chemical reactions mechanisms of magnesium-aluminium spinel polishing

2024 · Tianchen Zhao, Jiahong Ruan, et al. · Computational Materials Science · 5

The Preparation and Performance Analysis of a Cr2O3 Gel Abrasive Tool for Sapphire Substrate Polishing

2022 · Liang Zhao, Kaiping Feng, et al. · Lubricants · 5

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Study on Both-side Cylindrical Ultra-precision Lapping and Polishing Processes in Eccentric Rotations

2018 · Weifeng Yao, Julong Yuan, et al. · Zhongguo jixie gongcheng · 5

Simulation Analysis of the Chemical Mechanical Polishing Process for Monocrystal 4H-Silicon Carbide Based on Molecular Dynamics

2025 · Yang Lei, Weigang Guo, et al. · Micromachines · 4

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High precision and consistent machining of cylindrical rollers using ceramic lapping plates with both-sides machining method

2025 · Tianchen Zhao, Kaiping Feng, et al. · Journal of Materials Research and Technology · 4

Fabrication and Polishing Performance of Diamond Self-Sharpening Gel Polishing Disk

2023 · Lanxing Xu, Kaiping Feng, et al. · Micromachines · 4

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Effects of Changes in Gas Type and Partial Pressure on Chemical Mechanical Polishing Property of Si Substrate

2019 · Tao Yin, Kei Kitamura, et al. · ECS Journal of Solid State Science and Technology · 4

Study on the development of CeO2 self-sharpening gel abrasive tools and grinding performance on quartz glass

2024 · Kaiping Feng, Lanxing Xu, et al. · Journal of Mechanical Science and Technology · 3

Experimental Study on the Influence of Ultraviolet Laser Parameters on the Micro Machining Quality of Silicon Carbide Ceramic

2023 · Tianchen Zhao, Jiahong Ruan, et al. · ECS Journal of Solid State Science and Technology · 3

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Study on Development of Composite PAM/PI Gel Abrasive Tools and Finishing Performance on the Sapphire Substrates

2023 · Liang Zhao, Kaiping Feng, et al. · ECS Journal of Solid State Science and Technology · 3

Works count: 38

Citation count: 228

H-index: 8

I10-index: 7