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Chenhui Qu
Observed name:
Qu, Chenhui
Institution:
Lam Research (United States)
Observed institutions:
University of Michigan,
Lam Research (United States)
ORCID:
0000-0002-8300-9398
Observed ORCID:
0000-0002-8300-9398
OpenAlex ID:
A5019345968
Power matching to pulsed inductively coupled plasmas
2020
·
Chenhui Qu
, Steven J. Lanham
, et al.
·
Journal of Applied Physics
·
44
Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber
2019
·
Jia Han
, Patrick Pribyl
, et al.
·
Physics of Plasmas
·
30
Properties of arrays of microplasmas: application to control of electromagnetic waves
2017
·
Chenhui Qu
, Peng Tian
, et al.
·
Plasma Sources Science and Technology
·
20
Transients using low-high pulsed power in inductively coupled plasmas
2020
·
Chenhui Qu
, Sang Ki Nam
, et al.
·
Plasma Sources Science and Technology
·
16
PDF
Plasma-enhanced atomic layer deposition of SiO2 film using capacitively coupled Ar/O2 plasmas: A computational investigation
2021
·
Chenhui Qu
, Yukinori Sakiyama
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
15
Thermoelectric instability trends in argon radiofrequency plasmas
2025
·
Omar Alsaeed
, Benjamin T. Yee
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
2
Influence of gas composition on the Dufour instability in electropositive radiofrequency plasmas
2026
·
Omar Alsaeed
, Brett S Scheiner
, et al.
·
Plasma Sources Science and Technology
PDF
The Limits of Drift-Diffusion: Electron & Ion Transport in Radiofrequency Low-Temperature Plasmas
2026
·
Omar Alsaeed
, Cameron Wagoner
, et al.
·
IEEE International Conference on Plasma Science (ICOPS)
Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]
2020
·
Chenhui Qu
, Steven J. Lanham
, et al.
·
Journal of Applied Physics
Measurements of material induced effects on the plasma parameters of an inductively coupled plasma
2020
·
Joel Brandon
, Chenhui Qu
, et al.
·
APS Annual Gaseous Electronics Meeting Abstracts
Computational Investigations of Fundamental Plasma Processes in Semiconductor Industrial Applications
2020
·
Qu, Chenhui
·
Deep Blue (University of Michigan)
Consequences of E-H transitions in Impendence Matching of Pulsed Inductively Coupled Plasmas
2018
·
Chenhui Qu
, Steven J. Lanham
, et al.
·
Bulletin of the American Physical Society
Ignition Time and Transport Properties of Inductively Coupled Plasmas Using Low-High Pulsed Power
2018
·
Chenhui Qu
, Peng Tian
, et al.
·
IEEE International Conference on Plasma Science (ICOPS)
Customizing Capacitively Coupled Plasma Properties with Triple-Frequency Power Sources
2017
·
Chenhui Qu
, Peng Tian
, et al.
·
Bulletin of the American Physical Society
Customizing arrays of microplasmas for controlling properties of electromagnetic waves
2016
·
Chenhui Qu
, Peng Tian
, et al.
·
IEEE International Conference on Plasma Science (ICOPS)
Properties of DC-Pulsed Microplasma Arrays at Intermediate Pressures
2015
·
Peng Tian
, Chenhui Qu
, et al.
·
Bulletin of the American Physical Society
Scaling of Small Arrays of Microplasmas
2015
·
Chenhui Qu
, Peng Tian
, et al.
·
Bulletin of the American Physical Society
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Works count:
17
Citation count:
127
H-index:
5
I10-index:
5
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