Get started
Author

Ki Yeop Park

Observed institution: SK Hynix (South Korea)
OpenAlex ID: A5019462897
Integration using inorganic BARC in a via-first dual-damascene process with low-k dielectric
2004 · Jun Kyu Ahn, Seon Ho Choi, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
The Print Bias due to the Optical Proximity Effect and Process Optimization for 0.25mm Logic Devices
1997 · Ki Yeop Park, Byoung Il Choi, et al. · International Conference on VLSI and CAD
Works count: 2
Citation count:
H-index:
I10-index:
Year
Topic
Type