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Author

Annemarie Finzel

Observed names: A. Finzel, Finzel Annemarie, Finzel, Annemarie
ORCID: 0009-0003-7970-4034
Observed ORCID: 0009-0003-7970-4034
OpenAlex ID: A5020895101
Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition
2016 · C. Bundesmann, T. Lautenschläger, et al. · Applied Surface Science · 42
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Systematic investigation of the reactive ion beam sputter deposition process of SiO2
2018 · Maria Mateev, Thomas Lautenschläger, et al. · The European Physical Journal B · 23
Correlation of process parameters and properties of TiO2 films grown by ion beam sputter deposition from a ceramic target
2017 · Carsten Bundesmann, Thomas Lautenschläge, et al. · The European Physical Journal B · 14
Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range
2019 · Annemarie Finzel, Felix Koch, et al. · Optical Engineering · 13
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Properties of indium tin oxide thin films grown by Ar ion beam sputter deposition
2021 · Carsten Bundesmann, Jens Bauer, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 10
Ion beam sputter deposition of TiO2 films using oxygen ions
2018 · Lukas Pietzonka, Thomas Lautenschläger, et al. · The European Physical Journal B · 10
High-fluence hyperthermal ion irradiation of gallium nitride surfaces at elevated temperatures
2014 · A. Finzel, J.W. Gerlach, et al. · Applied Surface Science · 6
Graphene on silicon dioxide via carbon ion implantation in copper with PMMA-free transfer
2017 · Jan Lehnert, Daniel Spemann, et al. · Applied Physics Letters · 5
Ion beam sputter deposition of $$\hbox {SiO}_2$$ thin films using oxygen ions
2022 · Jacques Bernstein, Jürgen W. Gerlach, et al. · The European Physical Journal B · 4
Enhanced planarization technology by reactive ion beam etching and using a nanoimprint resist
2025 · Lukas P. Lingenfelder, Annemarie Finzel, et al. · Applied Physics A · 2
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Postannealing-induced intermetallic phase formation in NiPt thin films deposited via direct current and high-power impulse magnetron sputtering
2025 · Alexander Kühne, Wahyu Diyatmika, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2
Tuning of width to period ratio of synchrotron gratings by reactive ion beam etching
2026 · Stephan Görsch, Frank Frost, et al. · Surface and Coatings Technology · 1
Preparation and characterisation of carbon-free Cu(111) films on sapphire for graphene synthesis
2018 · J. Lehnert, D. Spemann, et al. · Journal of Physics Conference Series · 1
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Manufacturing of blazed gratings in silicon using new RIBE approaches
2026 · Gregor Dornberg, Annemarie Finzel, et al. · EPJ Web of Conferences
Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
2019 · Annemarie Finzel, Gregor Dornberg, et al. · EPJ Web of Conferences
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酸素イオンを用いたTiO_2膜のイオンビームスパッタ蒸着 プロセスパラメータと膜特性の間の相関の系統的研究【JST・京大機械翻訳】
2018 · Pietzonka Lukas, Lautenschlaeger Thomas, et al. · The European Physical Journal B
Works count: 17
Citation count: 133
H-index: 6
I10-index: 6
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