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Author

Jaehwan Kim

Observed name: Jae-Hwan Kim
Institution: Myongji University
Observed institution: Myongji University
ORCID: 0000-0002-2983-9905
Observed ORCID: 0000-0002-2983-9905
OpenAlex ID: A5021188435
On-Wafer Temperature Monitoring Sensor for Condition Monitoring of Repaired Electrostatic Chuck
2022 · Jae-Hwan Kim, Yoonsung Koo, et al. · Electronics · 15
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Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis
2023 · Chansu Han, Yoonsung Koo, et al. · Sensors · 8
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Works count: 2
Citation count: 23
H-index: 2
I10-index: 1
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