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Oskar Amster

Observed names: Amster Oskar, Amster, Oskar, O Amster, O. Amster
Institution: KLA (United States)
OpenAlex ID: A5023109184
Practical quantitative scanning microwave impedance microscopy
2017 · Oskar Amster, Fred Stanke, et al. · Microelectronics Reliability · 19
Scanning Microwave Impedance Microscopy (sMIM) in Electronic and Quantum Materials
2019 · Kurt A. Rubin, Yongliang Yang, et al. · Nanoscience and technology · 15
Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications
2014 · Stuart Friedman, Oskar Amster, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices Using Microwave Impedance Microscopy
2015 · Benedict Drevniok, St. John Dixon-Warren, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 7
Characterizing non-linear microwave behavior of semiconductor materials with Scanning Microwave Impedance Microscopy
2016 · Stuart Friedman, Yongliang Yang, et al. · IEEE MTT-S International Microwave Symposium digest · 6
Quantitative study of the thickness-dependent stress in indium tin oxide thin films
2023 · Jianhui Liang, Jiali Zhang, et al. · Thin Solid Films · 5
Practical quantitative scanning microwave impedance microscopy of semiconductor devices
2017 · Oskar Amster, Yongliang Yang, et al. · IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) · 4
Application of Scanning Microwave Microscopy nano-C-V to investigate dopant defect under a poly gate device
2018 · O. Amster, K.A. Rubin, et al. · Microelectronics Reliability · 3
Nanoscale Capacitance and Capacitance-Voltage Curves for Advanced Characterization of Electrical Properties of Si and GaN Structures Using Scanning Microwave Impedance Microscopy
2016 · Stuart Friedman, Oskar Amster, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 2
Nano C-V imaging of Semiconductor Devices with Scanning Microwave Impedance Microscopy
2018 · Oskar Amster, Kurt Rubin, et al. · IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) · 1
Measurement of Dielectric Constant and Doping Concentration of a Cross-Sectioned Device by Quantitative Scanning Microwave Impedance Microscopy
2017 · D. Iyer, A. Messinger, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 1
Nanoscale Capacitance and Capacitance-Voltage Curves for Advanced Characterization of Electrical Properties of Silicon and GaN Structures Using Scanning Microwave Impedance Microscopy (sMIM)
2017 · Oskar Amster, Stuart Friedman, et al. · EDFA Technical Articles · 1
Device Dielectric Quality Analysis and Fault Isolation at the Contact Level by Scanning Microwave Impedance Microscopy
2016 · Wei-Shan Hu, Jeng-Han Lee, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 1
Electrical Resistivity and Residual Stress in Sputtered Indium Tin Oxide Thin Films
2025 · Jianhui Liang, Jiali Zhang, et al. · EDFA Technical Articles
Cryogenic imaging of metal-insulator transitions and quantum hall edge states using a commercial Atomic Force Microscope with Scanning Microwave Impedance Microscopy (sMIM)
2018 · Yongliang Yang, Oskar Amster · Bulletin of the American Physical Society
ポリゲートデバイス下のドーパント欠陥を調べるための走査型マイクロ波顕微鏡ナノ-c-vの応用【jst・京大機械翻訳】
2018 · O Amster, K A Rubin, et al. · Microelectronics Reliability
Using Scanning Microwave Impedance Microscopy (sMIM) to characterize defects in dopants and dielectrics in semiconductor devices
2017 · Stuart Friedman, Yongliang Yang, et al. · Bulletin of the American Physical Society
INVITED TALK: Survey of common AFM electrical modes used in semiconductor Failure Analysis with further discussion of novel electrical modes that extend the capabilities for high resolution device characterization
2016 · Oskar Amster
Advances in imaging and quantification of electrical properties at the nanoscale using Scanning Microwave Impedance Microscopy (sMIM)
2016 · Stuart Friedman, Yongliang Yang, et al. · Bulletin of the American Physical Society
走査型マイクロ波インピーダンス顕微鏡を用いた半導体材料の非線形マイクロ波挙動の特性化【Powered by NICT】
2016 · Friedman Stuart, Yongliang Yang, et al. · IEEE Conference Proceedings
Works count: 21
Citation count: 76
H-index: 5
I10-index: 2
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