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Akihiro Suzuki
Institution:
Sumco Corporation (Japan)
Observed institutions:
Brother Industries (Japan),
Sumco Corporation (Japan)
ORCID:
0000-0002-1637-0407
Observed ORCID:
0000-0002-1637-0407
OpenAlex ID:
A5027114556
Hydrogen passivation for reduction of SiO2/Si interface state density using hydrocarbon-molecular-ion-implanted silicon wafers
2020
·
Ryosuke Okuyama
, Takeshi Kadono
, et al.
·
Japanese Journal of Applied Physics
·
22
PDF
Reduction of Dark Current in CMOS Image Sensor Pixels Using Hydrocarbon-Molecular-Ion-Implanted Double Epitaxial Si Wafers
2020
·
Ayumi Onaka-Masada
, Takeshi Kadono
, et al.
·
Sensors
·
14
PDF
Silicon Wafer Gettering Design for Advanced CMOS Image Sensors Using Hydrocarbon Molecular Ion Implantation: A Review
2021
·
Kazunari Kurita
, Takeshi Kadono
, et al.
·
IEEE Journal of the Electron Devices Society
·
13
PDF
Proximity gettering design of silicon wafers using silicon hydride and hydrocarbon mixture molecular ion implantation technique
2021
·
Ryo Hirose
, Takeshi Kadono
, et al.
·
Materials Science in Semiconductor Processing
·
8
PDF
Recrystallization model of discrete amorphous regions in C3H5-molecular-ion-implanted silicon substrate surface analyzed by X-ray photoelectron spectroscopy
2022
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
Japanese Journal of Applied Physics
·
6
PDF
Influence of oxygen on copper gettering in hydrocarbon molecular ion implanted region using atom probe tomography
2020
·
Satoshi Shigematsu
, Ryosuke Okuyama
, et al.
·
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
·
5
PDF
Photoemission Spectroscopy Study on Hydrogen Termination Effect on SiO2/Si Structure Fabricated Using H+-Implanted Si Substrate
2020
·
Akihiro Suzuki
, Kazutoshi Takahashi
, et al.
·
Journal of The Electrochemical Society
·
5
PDF
Fundamental Characteristics of Cyanide‐Related Multielement Molecular Ion‐Implanted Epitaxial Si Wafers for High‐Performance CMOS Image Sensors
2019
·
Akihiro Suzuki
, Takeshi Kadono
, et al.
·
physica status solidi (a)
·
5
PDF
Molecular and Atomic Hydrogen Diffusion Behavior by Reaction Kinetic Analysis in Projection Range of Hydrocarbon Molecular Ion for CMOS Image Sensors
2019
·
Ryosuke Okuyama
, Ayumi Onaka‐Masada
, et al.
·
physica status solidi (a)
·
4
PDF
RF Magnetron-Sputtered Si-Rich SiO2 Films on GdTbFe
1988
·
Akihiro Suzuki
, Riki Matsuda
, et al.
·
Japanese Journal of Applied Physics
·
4
PDF
Influence of carbon on Ni gettering in C2Hx+ and SiHy+ mixture molecular-ion-implanted silicon epitaxial wafer
2024
·
Ryo Hirose
, Ayumi Onaka-Masada
, et al.
·
Materials Science in Semiconductor Processing
·
3
Kinetic Monte Carlo Simulations for Recrystallization Process of Discrete Amorphous Regions in C3 H5-Molecular-Ion-Implanted Silicon Substrate Surface
2023
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
International Workshop on Junction Technology
·
3
Re-crystallization Behavior of Amorphous Layer in Hydrocarbon Molecular Ion Implanted Region Using Flash Lamp Annealing
2018
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
International Conference on Ion Implantation Technology
·
3
Interface trap density evaluation of off-angle Si(110)/SiO 2 MOS structures
2026
·
Ryotaro Shimura
, Eishin Nako
, et al.
·
Japanese Journal of Applied Physics
·
2
Reduction of White Spot Defects in CMOS Image Sensors Fabricated Using Epitaxial Silicon Wafer with Proximity Gettering Sinks by CH2P Molecular Ion Implantation
2022
·
Takeshi Kadono
, Ryo Hirose
, et al.
·
Sensors
·
2
PDF
Recrystallization kinetics of fully amorphized C3H5-molecular-ion-implanted silicon substrate surface
2025
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
MRS Advances
·
1
Surface Recrystallization Model of Fully Amorphized C3H5-Molecular-Ion-Implanted Silicon Substrate
2024
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
Crystals
·
1
PDF
Two- and Three-Dimensional Recrystallization of Discrete Amorphous in C3H5-Molecular-Ion-Implanted Silicon Surface Analyzed by TCAD Simulation
2024
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
ECS Journal of Solid State Science and Technology
·
1
TEM Image Analysis and Simulation Physics for Two-Step Recrystallization of Discretely Amorphized C3H5-Molecular-Ion-Implanted Silicon Substrate Surface
2024
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
Crystals
·
1
PDF
Hydrogen Termination Effect on SiO2/Si Interface State Defects of Silicon Hydride and Hydrocarbon Hybrid-Molecular-Ion-Implanted Silicon Epitaxial Wafer
2023
·
Ryosuke Okuyama
, Takeshi Kadono
, et al.
·
International Workshop on Junction Technology
·
1
In Situ Transmission Electron Microscopy Study of Shrinkage Kinetics of CH4N-Molecular-Ion-Implantation-Induced Extended Defects
2022
·
Akihiro Suzuki
, Takeshi Kadono
, et al.
·
Journal of The Electrochemical Society
·
1
PDF
Hydrogen diffusion behavior in CH2P-molecular-ion-implanted silicon wafers for CMOS image sensors
2021
·
Ryosuke Okuyama
, Takeshi Kadono
, et al.
·
Materials Science in Semiconductor Processing
·
1
PDF
Effect of ramping up rate on end of range defect in multielement molecular-ion (CH3O)-implanted silicon wafers
2019
·
Ryo Hirose
, Ayumi Onaka-Masada
, et al.
·
Japanese Journal of Applied Physics
·
1
PDF
Crystallographic dependence of SiOX transition layer evolution during native oxide formation on silicon surfaces
2026
·
Nawaphorn Kuhakongkiat
, Ryo Yokogawa
, et al.
·
Applied Surface Science Advances
Boosting CMOS Image Sensors: Exploring Silicon Hydride and Hydrocarbon Molecular Ion Implanted in Epitaxial Wafers
2026
·
Ayumi Onaka-Masada
, Ryo Hirose
, et al.
·
Sensors
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Works count:
47
Citation count:
107
H-index:
5
I10-index:
3
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