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Fangmeng Xu
Institutions:
Southeast University,
Southeast University
Observed institutions:
North University of China,
Southeast University,
Southeast University
ORCID:
0000-0003-0126-5732
Observed ORCID:
0000-0003-0126-5732
OpenAlex ID:
A5027319731
LGS-based SAW sensor that can measure pressure up to 1000 °C
2021
·
Tao Xue
, Fangmeng Xu
, et al.
·
Sensors and Actuators A Physical
·
35
High-temperature direct bonding of langasite using oxygen plasma activation
2020
·
Fangmeng Xu
, Tao Xue
, et al.
·
Scripta Materialia
·
10
Design strategy and micromachining technology of AT-cut high-frequency quartz resonators: A review
2025
·
Fangmeng Xu
, Chunyan Yin
, et al.
·
Materials Science in Semiconductor Processing
·
7
Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters
2022
·
Xiaorui Liang
, Yongwei Zhang
, et al.
·
Micromachines
·
6
PDF
Langasite Micromachining Technology Applied to Surface Acoustic Wave Sensors in Ultra-High Temperatures
2021
·
Fangmeng Xu
, Qiulin Tan
·
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
·
4
Langasite microstructure etching and characterization method for high temperature devices
2022
·
Xiaorui Liang
, Lei Zhang
, et al.
·
Vacuum
·
2
High aspect ratio through-wafer etching of AT-cut quartz using double-sided offset apertures
2026
·
Kaiwen Chen
, Chunyan Yin
, et al.
·
Sensors and Actuators A Physical
·
1
Electrode compensation strategy for etching-induced geometric deviations in high-frequency AT-cut quartz resonators
2026
·
Fangmeng Xu
, Kaiwen Chen
, et al.
·
Journal of Physics D Applied Physics
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Works count:
8
Citation count:
65
H-index:
4
I10-index:
2
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