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F.G. Boebel

Observed names: F. Böbel, F. G. Boebel, F. G. Böbel, F.G. Bobel, F.G. BÖbel, F.G. Böbel
OpenAlex ID: A5028236251
In-situ control of Ga(A1)As MBE layers by pyrometric interferometry
1993 · H. Grothe, F.G. Boebel · Journal of Crystal Growth · 36
Pyrometric interferometry for real time molecular beam epitaxy process monitoring
1994 · F. G. Böbel, H. Möller, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 33
In situ film thickness and temperature control of molecular beam epitaxy growth by pyrometric interferometry
1995 · F.G. Boebel, H. Möller, et al. · Journal of Crystal Growth · 28
Testing synergetic algorithms with industrial classification problems
1994 · T. Wagner, F.G. Boebel · Neural Networks · 26
Simultaneous in situ measurement of film thickness and temperature by using multiple wavelengths pyrometric interferometry (MWPI)
1993 · F.G. Boebel, H. Moller · IEEE Transactions on Semiconductor Manufacturing · 15
Cycle time reduction program at ACL
2002 · F.G. Boebel, O. Ruelle · ASMC proceedings · 12
In situ real-time temperature and thickness measurement for growth on MBE and RTCVD systems
1995 · H. Möller, F.G. Böbel, et al. · Journal of Crystal Growth · 10
In-situ observation of chemical vapour deposition growth of epitaxial SiGe thin films by reflexion supported pyrometric interferometry
1995 · G. Ritter, B. Tillack, et al. · Journal of Crystal Growth · 8
Quintuple ramp up slope by implementing cross-functional, self-directed work teams
2002 · F.G. Boebel · ASMC proceedings · 6
Synergetic learning for unsupervised texture classification tasks
1995 · T. Wagner, U. Schramm, et al. · Physica D Nonlinear Phenomena · 6
In-situ film thickness measurements by using pyrometric interferometry
2002 · F.G. Boebel, F. Gesellschaft, et al. · IEEE/CPMT International Electronics Manufacturing Technology Symposium · 5
Temperature Measurement at RTP Facilities-An Overview
1996 · J. Wagner, F. G. Boebel · MRS Proceedings · 5
Current filament dynamics in n-GaAs
1995 · H. Kostial, K. Ploog, et al. · Journal of Applied Physics · 5
Using A Synergetic Computer in an Industrial Classification Problem
1993 · T. Wagner, F. G. Boebel, et al. · Artificial Neural Nets and Genetic Algorithms · 5
Real Time Process Monitoring with Multiwave-Length Pyrometric Interferometry (Pi)
1993 · F.G. BÖbel, A. Wowchak, et al. · MRS Proceedings · 3
Simultaneous in-situ measurement of film thickness and temperature by using multiple wavelength pyrometric interferometry (MWPI)
1992 · F.G. Boebel, H. Moller · ASMC proceedings · 3
Determination of material flaw size by intensity evaluation of polychromatic X-ray transmission
1992 · R. Hanke, F. Böbel · NDT & E International · 3
30% productivity increase of 16 Mb-DRAM gate-conductor etching without additional investment
2002 · U. Rogatty, F.G. Boebel · ASMC proceedings · 2
Real time, in situ measurement of film thickness with reflexion supported pyrometric interferometry (RSPI)
1994 · F.G. Boebel, B. Hertel, et al. · ASMC proceedings · 2
Reflexion Supported Pyrometric Interferometry: Anew tool for in situ, real time temperature control in semiconductor manufacturing
1993 · F.G. Boebel, H. Moller, et al. · ASMC proceedings · 2
In situ real-time temperature and thickness measurement for Si/SiGe growth on MBE and RTCVD systems
1996 · H. Möller, F.G. Böbel, et al. · Elsevier eBooks
Temperature controlling with reflexion supported pyrometric interferometry (RSPI) at rapid thermal chemical vapor deposition-facilities (RTCVD)
1995 · J. Maeritz, H. Moller, et al. · ASMC proceedings
In-Situ Observation of Chemical Vapor Deposition of Thin Sige Films by Optical Reflection Interferometry
1994 · G. Ritter, B. Tillack, et al. · MRS Proceedings
Works count: 23
Citation count: 215
H-index: 8
I10-index: 7
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