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Takahiro Dazai
Institution:
Tokyo Ohka Kogyo (Japan)
Observed institutions:
University of Chicago,
Tokyo Ohka Kogyo (Japan)
OpenAlex ID:
A5029118256
Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly
2024
·
Shinsuke Maekawa
, Takehiro Seshimo
, et al.
·
Nature Communications
·
53
Ionic Liquids as Additives to Polystyrene-Block-Poly(Methyl Methacrylate) Enabling Directed Self-Assembly of Patterns with Sub-10 nm Features
2018
·
Xuanxuan Chen
, Chun Zhou
, et al.
·
ACS Applied Materials & Interfaces
·
40
PDF
Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography
2020
·
Daniel F. Sunday
, Xuanxuan Chen
, et al.
·
Chemistry of Materials
·
21
Perpendicular orientation control in thin films of POSS-containing block copolymer domains with a top-coat surface treatment
2016
·
Takehiro Seshimo
, Yoshiyuki Utsumi
, et al.
·
Polymer Journal
·
19
Three Dimensional Assembly in Directed Self-assembly of Block Copolymers
2016
·
Tamar Segal-Peretz
, Chun Zhou
, et al.
·
Journal of Photopolymer Science and Technology
·
13
PDF
Installation of the adamantyl group in polystyrene- block -poly(methyl methacrylate) via Friedel–Crafts alkylation to modulate the microphase-separated morphology and dimensions
2023
·
Takuya Isono
, Ema Baba
, et al.
·
Polymer Chemistry
·
8
PDF
High‐Fidelity Directed Self‐Assembly Using Higher‐ χ Polystyrene‐ Block ‐Poly(Methyl Methacrylate) Derivatives for Dislocation‐Free Sub‐10 nm Features
2025
·
Shinsuke Maekawa
, Lander Verstraete
, et al.
·
Advanced Functional Materials
·
7
PDF
Characteristics of low E a 193-nm chemical amplification resists
2006
·
Toshiyuki Ogata
, Yohei Kinoshita
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions
2018
·
Chun Zhou
, Roel Gronheid
, et al.
·
SPIE Novel Patterning Technologies
·
2
Ionic Liquid for Directed Self-Assembly of PS-b-PMMA
2016
·
Akiya Kawaue
, Tasuku Matsumiya
, et al.
·
Journal of Photopolymer Science and Technology
·
2
PDF
Guided self-assembly of Si-containing block copolymer with a topcoat surface treatment
2014
·
Takehiro Seshimo
, Yoshiyuki Utsumi
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Optimizing dual-function underlayers for minimal defectivity of directed self-assembly rectified extreme ultraviolet lithography patterns
2025
·
Byeong-U Bak
, Lander Verstraete
, et al.
·
Journal of Micro/Nanopatterning Materials and Metrology
·
1
Development of PS-PMMA Block Copolymers Incorporating Poly(n-butyl methacrylate) for Low Temperature Thermal Annealing toward Perpendicular Microdomain Alignment
2025
·
Hsi-Chih Wang
, Takehiro Seshimo
, et al.
·
Journal of Photopolymer Science and Technology
·
1
PDF
Dual function of precisely modified hydroxy-PS- b -PMMA as neutral layers and thin films for perpendicularly oriented lamella
2024
·
Riku Mizusaki
, Shinsuke Maekawa
, et al.
·
RSC Applied Interfaces
·
1
PDF
Synthesis of ABC/ACB-Type Triblock Copolymers Composed of Polystyrene and Polymethacrylate via Living Anionic Polymerization and Analyzing the Effect of Casting Solvents on Higher-Order Structures
2024
·
Ryota Uehara
, Shinsuke Maekawa
, et al.
·
Journal of Photopolymer Science and Technology
·
1
Desirable material selection on self-aligned multi-patterning
2018
·
Kyohei Koike
, Kazuki Yamada
, et al.
·
Advances in Patterning Materials and Processes
·
1
Sequence-Encoded Perpendicular Orientation in High-χ Triblock Copolymer Thin Films via Central Hydrophobic Block Placement
2026
·
Ryota Uehara
, Shinsuke Maekawa
, et al.
·
Macromolecules
PDF
Breakthroughs in contact hole patterning enabled by directed self-assembly
2026
·
Shota Iino
, Takehiro Seshimo
, et al.
·
SPIE Novel Patterning Technologies
The Effect of Side-Chain Modification via Hydrogen Bonding on the Microphase-Separated Structure of PS-b-P4VP-b-PMMA
2025
·
Ryota Uehara
, Shinsuke Maekawa
, et al.
·
Journal of Photopolymer Science and Technology
PDF
Author response for "Dual function of precisely modified hydroxy-PS-b-PMMA as neutral layers and thin films for perpendicularly oriented lamella"
2024
·
Riku Mizusaki
, Shinsuke Maekawa
, et al.
·
Publons reviews and discussion
Author response for "Dual function of precisely modified hydroxy-PS-b-PMMA as neutral layers and thin films for perpendicularly oriented lamella"
2024
·
Riku Mizusaki
, Shinsuke Maekawa
, et al.
·
Publons reviews and discussion
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Works count:
22
Citation count:
175
H-index:
7
I10-index:
5
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