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Nimet Kutay Eryilmaz
Institutions:
Jülich Aachen Research Alliance,
RWTH Aachen University
Observed institutions:
Jülich Aachen Research Alliance,
RWTH Aachen University
OpenAlex ID:
A5030100473
Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
2020
·
Sophia Schroeder
, Lukas Bahrenberg
, et al.
·
6
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Works count:
1
Citation count:
6
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1
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