Author

P. Longo

Observed names: Peter Longo, Peter P. Longo

Observed institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center

OpenAlex ID: A5030505791

X-ray mask repair with focused ion beams

1990 · A. Wagner, J. P. Levin, et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 76

MARS: Femtosecond laser mask advanced repair system in manufacturing

1999 · Richard Haight, Dennis Hayden, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 28

Overlay improvement roadmap: strategies for scanner control and product disposition for 5-nm overlay

2011 · Nelson M. Felix, Allen H. Gabor, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 20

Metal deposition with femtosecond light pulses at atmospheric pressure

2003 · R. Haight, P. Longo, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 20

Implementation and performance of a femtosecond laser mask repair system in manufacturing

1998 · Richard A. Haight, Dennis Hayden, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 16

Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair

2005 · Richard Haight, Alfred Wagner, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 14

High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair

2004 · Richard Haight, Alfred Wagner, et al. · Journal of Modern Optics · 14

MARS2: An Advanced Femtosecond Laser Mask Repair Tool

2002 · Alfred Wagner, Richard A. Haight, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 14

Material Processing Using Femtosecond Lasers: Repairing Patterned Photomasks

2006 · Richard Haight, Peter Longo, et al. · MRS Bulletin · 5

Focused ion beam metrology

1995 · A. Wagner, P. Longo, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 5

Focused Ion Beam Metrology

1995 · A. Wagner, P. Blauner, et al. · MRS Proceedings · 2

High resolution material processing with femtosecond lasers: mask repair and beyond

2003 · Richard Haight, Alfred Wagner, et al. · Frontiers in Optics

Works count: 12

Citation count: 214

H-index: 8

I10-index: 8