Author

Climbing Huang

Observed institutions: United Microelectronics (Taiwan), KLA (United States)

OpenAlex ID: A5031500900

Fast and accurate scatterometry metrology method for STI CMP step height process evaluation

2012 · Chih-Hsun Lin, Climbing Huang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12

Effects of Post-CMP Cleaning on Time Dependent Dielectric Breakdown and Electro-Migration in Porous Low-k∕Cu Interconnects

2011 · Chia-Lin Hsu, Dung-Ching Perng, et al. · Journal of The Electrochemical Society · 8

Formation of Ni(Pt) Germanosilicide Using a Sacrificial Si Cap Layer

2007 · Yi-Wei Chen, Yu-Lan Chang, et al. · IEEE International Interconnect Technology Conference (IITC) · 6

The TDDB failure mode and its engineering study for 45nm and beyond in porous low k dielectrics direct polish scheme

2010 · Chia-Lin Hsu, Kuan-Ting Lu, et al. · IEEE International Reliability Physics Symposium proceedings · 5

A model for post-CMP cleaning effect on TDDB

2011 · Chia-Lin Hsu, Wen-Chin Lin, et al. · IEEE International Reliability Physics Symposium proceedings · 4

Electrochemical Studies of W Corrosion for Low Resistive Contact in the 28 nm Technology Node

2011 · Chia-Lin Hsu, Dung-Ching Perng, et al. · Journal of The Electrochemical Society · 4

Chemical and Plasma Oxidation Behaviors of NiSi and NiPtSi Salicide Films in 65nm Node CMOS Process

2007 · Yu-Lan Chang, Yi-Wei Chen, et al. · IEEE International Interconnect Technology Conference (IITC) · 4

Defect study of manufacturing feasible porous low k dielectrics direct polish for 45nm technology and beyond

2009 · Chia-Lin Hsu, Jeng Yu Fang, et al. · IEEE International Interconnect Technology Conference (IITC) · 2

A Link Between Superconducting Transition and Optical Range Plasmonics of Niobium

2017 · C. Y. Liao, Harish N. S. Krishnamoorthy, et al. · ePrints Soton (University of Southampton)

Plasmonic response of superconducting niobium in the optical spectral range

2017 · C. Y. Liao, Harish N. S. Krishnamoorthy, et al. · ePrints Soton (University of Southampton)

Optical range plasmonics around the superconducting transition temperature of niobium metamaterial

2017 · C. Y. Liao, Harish N. S. Krishnamoorthy, et al. · ePrints Soton (University of Southampton)

Optical plasmonic response of niobium around the superconducting transition temperature

2017 · C. Y. Liao, Harish N. S. Krishnamoorthy, et al. · ePrints Soton (University of Southampton)

Optical range plasmonics of niobium around the superconducting transition temperature

2017 · C. Y. Liao, Harish N. S. Krishnamoorthy, et al. · ePrints Soton (University of Southampton)

CMP Defect Monitoring in HKMG Loop on Monitor Wafers

2012 · Peng Ren, Chun Wei Hsu, et al.

Cubic HfO2 Doped with Y2O3 for Advanced Gate Dielectrics by MBE.

2006 · Zhikai Yang, W.C. Lee, et al. · Bulletin of the American Physical Society

Works count: 15

Citation count: 45

H-index: 4

I10-index: 1