2015 · D. Chilukusha, C.A. Pineda-Vargas, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 5
2002 · R. Nemutudi, C. G. Smith, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2