Author

Zhenyu Wei

Observed institutions: Chinese Academy of Sciences, Institute of Semiconductors, University of Chinese Academy of Sciences

OpenAlex ID: A5036608900

A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

2021 · Pengfei Xu, Yurong He, et al. · Sensors · 17

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

2022 · Yingchun Fu, Guowei Han, et al. · Micromachines · 15

A new DRIE cut-off material in SOG MEMS process

2023 · Chaowei Si, Yingchun Fu, et al. · Journal of Semiconductors · 1

Works count: 3

Citation count: 33

H-index: 2

I10-index: 2