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Veerla Swarnalatha

Observed names: Swarnalatha V., Swarnalatha Veerla, Swarnalatha, Veerla, V Swarnalatha, V. Swarnalatha
ORCID: 0009-0008-4621-0034
Observed ORCID: 0009-0008-4621-0034
OpenAlex ID: A5040431970
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
2021 · Prem Pal, Veerla Swarnalatha, et al. · Micro and Nano Systems Letters · 151
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Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS
2017 · A. V. Narasimha Rao, V. Swarnalatha, et al. · Micro and Nano Systems Letters · 46
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Modified TMAH based etchant for improved etching characteristics on Si{1 0 0} wafer
2017 · V Swarnalatha, A V Narasimha Rao, et al. · Journal of Micromechanics and Microengineering · 26
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Effect of NH2OH on Etching Characteristics of Si{100} in KOH Solution
2017 · Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, et al. · ECS Journal of Solid State Science and Technology · 22
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Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution
2018 · Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, et al. · Micro & Nano Letters · 20
Wet anisotropic etching characteristics of Si{111} in NaOH-based solution for silicon bulk micromachining
2022 · S. Purohit, V. Swarnalatha, et al. · Micro and Nano Systems Letters · 18
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Enhanced etching characteristics of Si{100} in NaOH-based two-component solution
2022 · V. Swarnalatha, S. Purohit, et al. · Micro and Nano Systems Letters · 14
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Etching Mechanism Behind the High-Speed Etching of Silicon in NH2OH-added Alkaline Solutions
2019 · Veerla Swarnalatha, Kanneri Thettiyappath Vismaya, et al. · IEEJ Transactions on Sensors and Micromachines · 13
Systematic study of the etching characteristics of Si{111} in modified TMAH
2019 · Veerla Swarnalatha, Prem Pal, et al. · Micro & Nano Letters · 11
Aging Effects of KOH+NH2OH Solution on the Etching Characteristics of Silicon
2019 · Avvaru Venkata Narasimha Rao, Prem Pal, et al. · ECS Journal of Solid State Science and Technology · 11
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Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern
2018 · Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, et al. · Micro and Nano Systems Letters · 11
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Effect of Shocked Impact of 50 Scaling on the Structural, Morphological, Optical, and Electrical Properties of MMTC Crystals for Correlated Sensor, Photonic, and Piezoelectric Functionalities
2024 · K. Suganya, K. SenthilKannan, et al. · Journal of Electronic Materials · 5
Silicon Anisotropic Etching in Ternary Solution Composed of TΜΑΗ+Triton+NH 2 ΟΗ
2017 · Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, et al. · ECS Transactions · 4
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Effect of Surfactant and Alcohol Additives on Etching Characteristics in Aqueous Potassium Hydroxide Solutions
2017 · Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, et al. · ECS Transactions · 4
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Microstructures with Protected Convex Corners in Modified KOH Solution Exhibiting High-Speed Silicon Etching
2018 · Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, et al. · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · 2
Growth, Characterizations of Aspartame-ASP Crystals for Mechano, Spectral, Photonic, Opto-Electronic and Sensor Applications
2024 · Jamuna R., Swarnalatha V., et al. · ECS Journal of Solid State Science and Technology · 1
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Etching Characteristics of Si{110} in NaOH Based Solution
2022 · Soumya Purohit, Veerla Swarnalatha, et al. · Mechanisms and machine science · 1
Deep Grooves in Borofloat Glass by Wet Bulk Micromachining
2022 · Adarsh Nigam, Swarnalatha Veerla, et al. · Mechanisms and machine science · 1
A review of silicon bulk micromachining in NaOH solutions for MEMS fabrication
2026 · P. Pal, V. Swarnalatha, et al. · Micro and Nano Systems Letters
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High Speed Etching of Silicon in NaOH-Based Solution
2024 · S. Purohit, V. Swarnalatha, et al. · Springer proceedings in physics
Design and Simulation of Stepped Microcantilevers for Energy Harvesting Applications
2024 · S. Purohit, V. Swarnalatha, et al. · Springer proceedings in physics
Silicon Etching Characteristics in Modified TMAH Solution
2019 · Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, et al. · Springer proceedings in physics
TMAH Based High Speed Silicon Bulk Micromachining for MEMS
2019 · Veerla Swarnalatha, Prem Pal · Research Archive of Indian Institute of Technology Hyderabad (Indian Institute of Technology Hyderabad)
Effect of Surfactant and Alcohol Additives on Etching Characteristics in Aqueous Potassium Hydroxide Solutions
2017 · Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, et al. · ECS Meeting Abstracts
Silicon Anisotropic Etching in Ternary Solution Composed of TΜΑΗ+Triton+NH2ΟΗ
2017 · Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, et al. · ECS Meeting Abstracts
Works count: 29
Citation count: 362
H-index: 11
I10-index: 11
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