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Tetsuji Kiyota

Observed names: Kiyota, Tetsuji, T. Kiyota, Tetsuji KIYOTA
Institution: Ulvac (Japan)
Observed institution: Ulvac (Japan)
ORCID: 0009-0005-1162-2061
Observed ORCID: 0009-0005-1162-2061
OpenAlex ID: A5043591377
Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation
2023 · Yuya Yamashita, Kenta Doi, et al. · Review of Scientific Instruments · 7
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Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model
2024 · Yuya Yamashita, Kenta Doi, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 5
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Evaluation of properties of aluminum films deposited using an ultrahigh vacuum sputtering system
1993 · S. Toyoda, T. Kiyota, et al. · Materials Science and Engineering A · 4
Aluminum Film Deposition Using an Ultrahigh-Vacuum Sputtering System
1993 · Tetsuji Kiyota, Satoru Toyoda, et al. · Japanese Journal of Applied Physics · 2
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Application of Gases to Surface Finishing Technologies. Effects of the Gases in Sputtering Processes.
1998 · Tetsuji KIYOTA · Journal of The Surface Finishing Society of Japan · 1
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All aluminum alloy sputter equipment of small scale.
1985 · Hiroyuki YAMAKAWA, Kazuo YUI, et al. · Shinku · 1
Spatial Distribution Measurement of Electron Temperature and Density in N2-Ar ICP by Tomographic OES
2026 · 島谷, 和希, 清田, 哲司, et al. · Institutional Repositories DataBase (IRDB)
Multiple solutions in the T e – N e parameter space of argon CR model via Monte Carlo optimization
2026 · Yuchen Ye, Kenta Doi, et al. · Plasma Sources Science and Technology
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Diagnostics of CF4/O2 Capacitively Coupled Plasma Using Tomographic Emission Spectroscopy
2026 · 吉井 大翔, Masato Yoshii, et al. · Tokyo Tech Research Repository (Tokyo Institute of Technology)
Comparison of Analytical and Non-parametric Inversion Approaches for EEPFs in Ar ICP based on OES and CRM
2026 · 叶宇晨, Yuchen Ye, et al. · Tokyo Tech Research Repository (Tokyo Institute of Technology)
トモグラフィ発光分光計測を用いたcf4/o2容量結合プラズマの診断
2026 · 吉井, 大翔, Yoshii, Masato, et al. · Institutional Repositories DataBase (IRDB)
発光分光法と衝突輻射モデルによるアルゴン誘導結合プラズマの電子エネ ルギー分布関数構築における解析・非パラメータ手法の比較
2026 · YE, YUCHEN, 清田, 哲司, et al. · Institutional Repositories DataBase (IRDB)
Spatial Distribution Diagnosis of Electron Temperature and Density in Inductively Coupled Nitrogen-Argon Plasma by Tomographic OES: Validation with High-Resolution Single-Channel Spectroscopy and Langmuir Probe Measurement
2026 · 島谷和希, Kazuki Shimatani, et al. · Tokyo Tech Research Repository (Tokyo Institute of Technology)
Spatially Resolved Measurement of Oxygen ICP and CCP Using Optical Emission Spectroscopy with Tomographic Analysis
2026 · 何 文涛, Wentao He, et al. · Tokyo Tech Research Repository (Tokyo Institute of Technology)
トモグラフィック発光分光法による誘導結合窒素・アルゴンプラズマの電子温度・密度空間分布計測および高分解能シングルチャネル分光とラングミュアプローブによる検証
2026 · 島谷, 和希, 清田, 哲司, et al. · Institutional Repositories DataBase (IRDB)
トモグラフィ解析を用いた発光分光法による誘導結合および容量結合酸素プラズマの空間分解計測
2026 · 何, 文涛, 清田, 哲司, et al. · Institutional Repositories DataBase (IRDB)
Spatially-Resolved Measurements Of Electron Temperature And Density Of Oxygen ICP By Tomographic Emission Spectroscopy
2025 · 何文涛, 清田哲司, et al. · Tokyo Tech Research Repository (Tokyo Institute of Technology)
Effects of Bias Power on EEPFs near the Substrate in Argon ICP Measured by a Langmuir Probe
2025 · 叶宇晨, Yuchen Ye, et al. · Institutional Repositories DataBase (IRDB)
Spatially-Resolved Measurements Of Electron Temperature And Density Of Oxygen ICP By Tomographic Emission Spectroscopy
2025 · 何, 文涛, He, Wentao, et al. · Institutional Repositories DataBase (IRDB)
Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects
2025 · 叶宇晨, Yuchen Ye, et al. · Institutional Repositories DataBase (IRDB)
Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis
2025 · 何文涛, He Wentao, et al. · Institutional Repositories DataBase (IRDB)
Spatial distribution measurement of electron temperature and density of inductively coupled nitrogen plasma by tomographic optical emission spectroscopy
2025 · 島谷和希, Kazuki Shimatani, et al. · Institutional Repositories DataBase (IRDB)
トモグラフィー発光分光法による減圧酸素icpの空間分解計測
2025 · 何, 文涛, He, Wentao, et al. · Institutional Repositories DataBase (IRDB)
低気圧アルゴンプラズマの空間平均分光計測と局所電子温度・密度との関係
2025 · 福本, 晃己, Fukumoto, Koki, et al. · Institutional Repositories DataBase (IRDB)
スパッタＷ膜形成時の内部応力in-situ観測による成長機構解析
2025 · 中川, 茂樹, Nakagawa, Shigeki, et al. · Institutional Repositories DataBase (IRDB)
Works count: 45
Citation count: 20
H-index: 3
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