Author

Norihito Fukugami

Observed names: Fukugami Norihito, N. Fukugami, Norihito FUKUGAMI

Observed institution: Toppan (Japan)

OpenAlex ID: A5044585048

Imprinted optical pattern of low-softening phosphate glass

2007 · Hiromichi Takebe, Makoto Kuwabara, et al. · Optics Letters · 38

Experimental approach to EUV imaging enhancement by mask absorber height optimization

2013 · Natalia Davydova, Robert de Kruif, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 27

Impact of an etched EUV mask black border on imaging and overlay

2012 · Natalia Davydova, Robert de Kruif, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 18

Impact of an etched EUV mask black border on imaging: part II

2013 · Natalia Davydova, Robert de Kruif, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 14

Density measurement of thin glass layers for gas barrier films

1999 · Norihito Fukugami, Hideo Nishino, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 13

Black border with etched multilayer on EUV mask

2012 · Norihito Fukugami, Kazuaki Matsui, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11

Black border, mask 3D effects: covering challenges of EUV mask architecture for 22nm node and beyond

2014 · Natalia Davydova, Eelco van Setten, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9

Achievements and challenges of EUV mask imaging

2014 · Natalia Davydova, Eelco van Setten, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9

Permeation of gases through polymer membranes investigated by mass spectroscopy

1999 · H. Nörenberg, T. Miyamoto, et al. · Vacuum · 7

Simulation of image placement error due to fabrication of black border on EUV mask

2014 · Yasushi Nishiyama, Shinpei Kondo, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

EUV mask with advanced hybrid black border suppressing EUV and DUV OOB light reflection

2018 · Genta Watanabe, Norihito Fukugami, et al. · Photomask and next-generation lithography mask technology. Conference · 3

Novel EUV mask black border suppressing EUV and DUV OoB light reflection

2016 · Shin Ito, Yutaka Kodera, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Novel EUV mask black border and its impact on wafer imaging

2016 · Yutaka Kodera, Norihito Fukugami, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Defectivity evaluation of EUV reticles with etched multilayer image border by wafer printing analysis

2015 · Rik Jonckheere, Erik Verduijn, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Pattern shape analysis tool for quantitative estimate of photomask and process

2001 · Isao Yonekura, Yuhichi Fukushima, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Pattern shape analysis tool for defect judgement of photomask

2000 · Fuyuhiko Matsuo, Masao Otaki, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

ブラックボーダー,マスク3D効果:22nmノードとそれを超えるEUVマスクアーキテクチャのカバーリング課題

2014 · Davydova Natalia, Van Setten Eelco, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Euvマスク上のブラックボーダーの作製による画像位置誤差のシミュレーション | 文献情報 | J-global 科学技術総合リンクセンター

2014 · Nishiyama Yasushi, Kondo Shinpei, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Study of etching process for LER and resolution

2010 · Tomohiro Imoto, Yosuke Kojima, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Nano-Fabrication of Nano-Crystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

2005 · Hidenori GAMO, Mikka N.-GAMO, et al. · Hyomen Kagaku

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Works count: 20

Citation count: 162

H-index: 8

I10-index: 6