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Jeong Eun Choi
Observed name:
Jeong Eun CHOI
Institution:
Myongji University
Observed institution:
Myongji University
ORCID:
0000-0002-5233-7364
Observed ORCID:
0000-0002-5233-7364
OpenAlex ID:
A5045797924
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment
2022
·
Sun Ho Kim
, Chan Young Kim
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
·
46
Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process
2021
·
Jeong Eun Choi
, Sang Jeen Hong
·
Measurement Sensors
·
37
PDF
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma
2021
·
Jeong Eun Choi
, Hyoeun Park
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
·
34
Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data
2023
·
Jeong Eun Choi
, Da Hoon Seol
, et al.
·
Sensors
·
33
PDF
Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment
2021
·
Hyoeun Park
, Jeong Eun Choi
, et al.
·
Electronics
·
32
PDF
Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study
2023
·
Da Hoon Seol
, Jeong Eun Choi
, et al.
·
Electronics
·
19
PDF
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber
2024
·
Surin An
, Jeong Eun Choi
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
·
14
Analysis of optical emission spectroscopy data during silicon etching in SF6/O2/Ar plasma
2021
·
Dong Hwan KIM
, Jeong Eun CHOI
, et al.
·
Plasma Science and Technology
·
12
Deep Neural Network Modeling of Multiple Oxide/Nitride Deposited Dielectric Films for 3D-NAND Flash
2020
·
Jeong Eun Choi
, Jungho Song
, et al.
·
Applied Science and Convergence Technology
·
11
PDF
In-situ process monitoring for eco-friendly chemical vapor deposition chamber cleaning
2021
·
Su-Rin An
, Jeong Eun Choi
, et al.
·
Journal of the Korean Physical Society
·
9
Explainable artificial intelligence-based evidential inferencing on process faults in plasma etching
2024
·
Jeong Eun Choi
, Surin An
, et al.
·
Journal of Physics D Applied Physics
·
7
Effect of the inertial term of the ion momentum equation on fluid transport simulation for capacitively coupled plasma sources
2022
·
Yongil Lee
, Jeong Eun Choi
, et al.
·
Current Applied Physics
·
2
Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis
2024
·
Younji Lee
, Jeong Eun Choi
, et al.
·
Applied Science and Convergence Technology
PDF
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Works count:
13
Citation count:
256
H-index:
9
I10-index:
9
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