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A. Bich

Observed names: Andreas Bich, Bich, A., Bich, Andreas
OpenAlex ID: A5049796362
Advanced mask aligner lithography: new illumination system
2010 · Reinhard Voelkel, Uwe Vogler, et al. · Optics Express · 93
Fabrication and characterization of linear diffusers based on concave micro lens arrays
2010 · Roland Bitterli, Toralf Scharf, et al. · Optics Express · 44
Full wafer microlens replication by UV imprint lithography
2009 · H. Schmitt, M. Rommel, et al. · Microelectronic Engineering · 38
Multifunctional micro-optical elements for laser beam homogenizing and beam shaping
2008 · A. Bich, J. Rieck, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 25
Contact and proximity lithography using 193nm Excimer laser in Mask Aligner
2009 · S. Partel, S. Zoppel, et al. · Microelectronic Engineering · 19
Optimization of illumination pupils and mask structures for proximity printing
2009 · K. Motzek, A. Bich, et al. · Microelectronic Engineering · 11
Variable phaseplates for focus invariant optical systems
2005 · T. Hellmuth, A. Bich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 10
Flexible beam shaping system using fly’s eye condenser
2010 · Norbert Lindlein, Andreas Bich, et al. · Applied Optics · 7
Refractive statistical concave 1D diffusers for laser beam shaping
2008 · Roland Bitterli, Myunsik Kim, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Refractive Micro-optics for Multi-spot and Multi-line Generation
2008 · Maik Zimmermann, Michael Schmidt, et al. · 5
Research on fabrication of aspheres at the Center of Optics Technology (University of Applied Science in Aalen)
2005 · Jochen Burger, Andreas Bich, et al. · Optifab · 4
Shaping light with MOEMS
2011 · W. Noell, S. Weber, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Mask aligner process enhancement by spatial filtering
2011 · Uwe Vogler, Andreas Bich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Dynamically deformable reflective membrane for laser beam shaping and smoothing
2012 · J. Masson, R. Bitterli, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Dynamically deformable micromirror array for defined laser beam shaping and homogenizing
2011 · Jonathan Masson, Roland Bitterli, et al. · International Conference on Optical MEMS and Nanophotonics
Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes
2010 · Jonathan Masson, Andreas Bich, et al. · International Conference on Optical MEMS and Nanophotonics
Deformable silicon membrane for dynamic linear laser beam diffuser
2010 · J. Masson, A. Bich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
2009 · J. Masson, A. Bich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Dynamic array spot shaping for laser micro machining
2009 · A. Bich, K. J. Weible, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Tunable MEMS-based optical linear (1D) diffusers for dynamic laser beam shaping and homogenizing
2009 · J. Masson, A. Bich, et al. · International Conference on Optical MEMS and Nanophotonics
Linearly deformable micro membrane for dynamic laser beam shaping and homogenizing
2009 · J. Masson, Wilfried Noell, et al. · Infoscience (Ecole Polytechnique Fédérale de Lausanne)
Fabrication and Characterisation of 1-D diffusing elements
2009 · R. Bitterli, M.-S. Kim, et al. · Infoscience (Ecole Polytechnique Fédérale de Lausanne)
Randomly varying micro-optical elements for the generation of uniform intensity profiles in coherent laser sources
2008 · K. J. Weible, A. Bich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Linear diffusers with ultra small angles for high power beam shaping, Congress Laser Optics
2008 · R. Bitterli, Toralf Scharf, et al. · Infoscience (Ecole Polytechnique Fédérale de Lausanne)
Fabrication Rules and Characterization of Concave Microstructures in Fused Silica
2008 · R. Bitterli, M.-S. Kim, et al. · Infoscience (Ecole Polytechnique Fédérale de Lausanne)
Works count: 29
Citation count: 268
H-index: 7
I10-index: 7
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