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Author

Surin An

Observed names: S AN, Su-Rin An
Institution: Myongji University
Observed institution: Myongji University
ORCID: 0000-0001-7582-6147
Observed ORCID: 0000-0001-7582-6147
OpenAlex ID: A5050217617
Spectroscopic Analysis of NF3 Plasmas with Oxygen Additive for PECVD Chamber Cleaning
2023 · Surin An, Sang Jeen Hong · Coatings · 23
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An in situ monitoring method for PECVD process equipment condition
2018 · G KANG, S AN, et al. · Plasma Science and Technology · 19
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber
2024 · Surin An, Jeong Eun Choi, et al. · IEEE Transactions on Semiconductor Manufacturing · 14
Plasma Ion Bombardment Induced Heat Flux on the Wafer Surface in Inductively Coupled Plasma Reactive Ion Etch
2023 · Sung Il Cho, Hyun Keun Park, et al. · Applied Sciences · 13
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In-situ process monitoring for eco-friendly chemical vapor deposition chamber cleaning
2021 · Su-Rin An, Jeong Eun Choi, et al. · Journal of the Korean Physical Society · 9
Explainable artificial intelligence-based evidential inferencing on process faults in plasma etching
2024 · Jeong Eun Choi, Surin An, et al. · Journal of Physics D Applied Physics · 7
Characterization of PECVD Si3N4 thin film in multiple oxide–nitride stack for 3D-NAND flash memory
2023 · Jaekeun Baek, Surin An, et al. · Semiconductor Science and Technology · 3
Influence of Flow Rates and Flow Times of Plasma-Enhanced Atomic Layer Deposition Purge Gas on TiN Thin Film Properties
2024 · Ju Eun Kang, Surin An, et al. · Coatings · 1
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Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis
2024 · Younji Lee, Jeong Eun Choi, et al. · Applied Science and Convergence Technology
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Kinetic Mechanism of Reactive Oxygen/Nitrogen Species in Plasma-Assisted Greenhouse Gas Replacement
2021 · Seonbyul Lee, Surin An, et al. · Science of Advanced Materials
Works count: 10
Citation count: 89
H-index: 6
I10-index: 4
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