Get started
Author

Katsuhide Watanabe

Observed names: K. Watanabe, Katsuhide WATANABE
Institution: Ebara (Japan)
Observed institutions: Kyushu University, Osaka Prefecture University, Fujitsu (Japan), Nichias (Japan), Daido Steel (Japan), Ebara (Japan)
OpenAlex ID: A5057826077
Combination of H/sup ∞/ and PI control for an electromagnetically levitated vibration isolation system
2002 · K. Watanabe, S. Hara, et al. · IEEE Conference on Decision and Control (CDC) · 29
Visualization of Acoustic Waves and Cavitation in Ultrasonic Water Flow
2021 · Hidehisa Usui, Tomoatsu Ishibashi, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 13
PDF
Seismic Test on Turbo-Molecular Pumps Levitated by Active Magnetic Bearing
1989 · Yukio Murai, Katsuhide Watanabe, et al. · Springer eBooks · 6
A character projection low energy electron beam direct writing system for device of small production lot with a variety of design
2006 · Fumihiko Nakamura, Katsuhide Watanabe, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Optimal Injection Distance in Ultrasonic Water Flow Cleaning
2023 · Keita Ando, Riria Sakota, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
PDF
Planarization profile modeling using pad bulk deformation and real contact area analysis of macro-scale device pattern
2023 · Seonho Jeong, Jongmin Jeong, et al. · Japanese Journal of Applied Physics · 3
PDF
Blind nonlinear equalization using 4th-order cumulant
2003 · K. Watanabe, Yen Wei Chen, et al. · SICE Annual Conference (SICE) · 3
Active Micro-Vibration Control System Using Both Air Springs and Magnetic Bearings. 2nd Report. Isolation Performances Using H.INF. Control and Disturbance Cancellation Control.
1995 · Weimin Cui, Kenzo Nonami, et al. · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C · 3
PDF
Parametric Studies on Particle Removal and Erosion in Nozzle Injection Megasonic Cleaning
2023 · Tomoatsu Ishibashi, Hisanori Matsuo, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2
PDF
Physical Simulation and Visualization of the Marangoni Convection inside Meniscus Region under IPA Vapor in Wafer Drying Process
2019 · Naoki Ono, Takashi Yamada, et al. · ECS Transactions · 2
PDF
Thickness Control Technology for CMP Process
2018 · Katsuhide WATANABE · Journal of the Japan Society for Precision Engineering · 2
ICONE23-1610 Endurance test report of rubber sealing materials for the containment vessel
2015 · R. Yamamoto, K. Watanabe, et al. · The Proceedings of the International Conference on Nuclear Engineering (ICONE) · 2
PDF
A Design Method of Spatial and Temporal RBF Equalizer Using Adaptive Array Antenna
2002 · Katsuhide Watanabe, Katsumi Yamashita · IEEJ Transactions on Electronics Information and Systems · 2
PDF
Micro-Vibration Control by Active Magnetic Levitation System.
2002 · Katsuhide WATANABE, Yoichi KANEMITSU, et al. · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C · 2
PDF
Active Control of a Flexible Rotor by an Active Bearing
1989 · Yoichi Kanemitsu, Masaru Ohsawa, et al. · Springer eBooks · 2
The endpoint detection method using moiré pattern in CMP’s EPD system
2023 · Sho Takitani, Soma Yamamoto, et al. · Japanese Journal of Applied Physics · 1
PDF
A Design Method of Blind Spatial and Temporal RBF Equalizer Using Genetic Algorithm
2004 · Katsuhide Watanabe, Hai Lin, et al. · IEEJ Transactions on Electronics Information and Systems · 1
PDF
Robust Controller Design of Rotary Actuator of Contact-free Clean Robot Using Magnetic Bearings
2002 · Yoichi KANEMITSU, Kazunari FUJII, et al. · The Proceedings of the International Conference on Motion and Vibration Control · 1
PDF
Vibration damping apparatus
1999 · Katsuhide Watanabe · The Journal of the Acoustical Society of America · 1
Magnetically Suspended Linear Pulse Motor for Semiconductor Wafer Transfer in Vacuum Chamber
1996 · S. Moriyama, Naoji Hiraki, et al. · 1
Positioning and Microvibration Control by Electromagnets of an Air Spring Vibration Isolation System
1996 · Katsuhide Watanabe, Weimin Cui, et al. · NASA Technical Reports Server (NASA) · 1
PDF
Linear Drive Systems and their Related Technologies. Development of Magnetically Suspended Linear Pulse Motor for Contactless Direct Drive in Vacuum Chamber Robot.
1995 · Shin-ichi Moriyama, Naoji Hiraki, et al. · IEEJ Transactions on Industry Applications · 1
PDF
Electromagnetically levitated vibration isolation system for the manufacturing process of silicon monocrystals
1994 · Yoichi KANEMITSU, Katsuhide Watanabe, et al. · NASA Technical Reports Server (NASA) · 1
PDF
Polysilphenylenesiloxane Resist with Three-Dimensional Structure
1993 · K. Watanabe, E. Yano, et al. · ACS symposium series · 1
Physical Simulation and Visualization of the Marangoni Convection inside Meniscus Region under IPA Vapor in Wafer Drying Process
2019 · Naoki Ono, Takashi Yamada, et al. · ECS Meeting Abstracts
Works count: 40
Citation count: 89
H-index: 4
I10-index: 2
Year
Topic
Type