Author

Renju Peng

Observed name: R. PENG

Institution: Chengdu Technological University

Observed institutions: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu Technological University, Beihang University

ORCID: 0000-0002-5323-1094

Observed ORCID: 0000-0002-5323-1094

OpenAlex ID: A5059361900

Machine-learning models for analyzing TSOM images of nanostructures

2019 · Yufu Qu, Jialin Hao, et al. · Optics Express · 18

A through‐focus scanning optical microscopy dimensional measurement method based on deep‐learning classification model

2021 · Haitao Nie, Renju Peng, et al. · Journal of Microscopy · 10

Lateral movement and angular illuminating non-uniformity corrected TSOM image using Fourier transform

2020 · Renju Peng, Jie Jiang, et al. · Optics Express · 9

Focused and TSOM Images Two-Input Deep-Learning Method for Through-Focus Scanning Measuring

2022 · Zhange Zhang, Jiajun Ren, et al. · Applied Sciences · 6

Imaging error compensation method for through‐focus scanning optical microscopy images based on deep learning

2021 · Yufu Qu, Jiajun Ren, et al. · Journal of Microscopy · 6

Uncertainty optimization based on sensitivity analysis for TSOM method in multi-measurands metrology

2023 · Renju Peng, Jie Jiang, et al. · Optics and Lasers in Engineering · 5

Statistical character analysis for through-focus scanning optical microscopy in double floating variables measurement applications

2021 · Renju Peng, Jie Jiang, et al. · Optics and Lasers in Engineering · 5

Influence of Illumination Polarization and Target Structure on Measurement Sensitivity of Through-Focus Scanning Optical Microscopy

2018 · Yufu Qu, Renju Peng, et al. · Applied Sciences · 4

TSOM method for nanometrology using regression model of image principal component coefficients

2025 · Renju Peng, Wanli Peng, et al. · Optics and Lasers in Engineering · 3

Interference illumination of three nonzero‐order beams for LCOS‐based structured illumination microscopy

2019 · Y. QU, H. PAN, et al. · Journal of Microscopy · 2

Analysis of three-dimensional pinhole diffraction of deep ultraviolet converging light with a large numerical aperture

2025 · Renju Peng, Yong Zhou, et al. · Applied Optics · 1

Influence of principal component coefficient number on the performance of through-focus scanning image-based principal component regression for nanostructure metrology

2026 · Renju Peng, Jianshu Liu, et al. · Measurement

Works count: 12

Citation count: 69

H-index: 5

I10-index: 2