Author

Taido Kurauchi

Institution: Nissin Ion Equipment Co., Ltd. (Japan)

Observed institution: Nissin Ion Equipment Co., Ltd. (Japan)

ORCID: 0009-0007-7267-6420

Observed ORCID: 0009-0007-7267-6420

OpenAlex ID: A5059373687

Development of ultra-high-current implanter for material modification process in next era devices

2023 · Hiroaki Kai, Yuya Uchida, et al. · MRS Advances · 6

Enhancement of CMP removal rate of SiC by ion implantation

2026 · Yuya Uchida, Sota Ueda, et al. · Japanese Journal of Applied Physics · 1

Space charge neutralization system for low-energy high-current implanter

2025 · Taido Kurauchi, Hiroaki Kai, et al. · MRS Advances · 1

Development of plasma flood gun for low energy and high current ion implanter

2025 · Taido Kurauchi, Sami K. Hahto, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

New operation method for ion source parameters to improve single ionization efficiency

2025 · Hiroaki Kai, Yuya Uchida, et al. · MRS Advances

Works count: 5

Citation count: 8

H-index: 1

I10-index: