Author

Erik S. Cheng

Observed names: Cheng, Erik, Cheng, Erik S, Cheng, Erik S., Erik Cheng

Institutions: Texas Materials Institute, The University of Texas at Austin

Observed institutions: Texas Materials Institute, The University of Texas at Austin, University of California, Berkeley

ORCID: 0000-0003-0876-6097

Observed ORCID: 0000-0003-0876-6097

OpenAlex ID: A5060011975

Surprising Effects of Hydrochloric Acid on the Water Evaporation Coefficient Observed by Raman Thermometry

2017 · Anthony M. Rizzuto, Erik S. Cheng, et al. · The Journal of Physical Chemistry C · 30

Dissociative chemisorption of methyl fluoride and its implications for atomic layer etching of silicon nitride

2020 · Erik Cheng, Gyeong S. Hwang · Applied Surface Science · 14

Ammonium chloride (–NH3+Cl-) salt formation from dichlorosilane decomposition and its potential impact on silicon nitride atomic layer deposition

2023 · Tsung-Hsuan Yang, Erik S. Cheng, et al. · Applied Surface Science · 5

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

2023 · Erik S. Cheng, Peter L. G. Ventzek, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 4

A density functional tight-binding based strategy for modeling ion bombardment and its application to Ar bombardment of silicon nitride

2024 · Erik S. Cheng, Peter L. G. Ventzek, et al. · Journal of Applied Physics · 1

Low-energy argon ion bombardment-induced decomposition of physisorbed hydrofluorocarbons on silicon nitride surfaces: A computational mechanistic study

2023 · Erik S. Cheng, Gyeong S. Hwang · The Journal of Chemical Physics · 1

Silicon Nitride Surface Modification by Ion Bombardment with Physisorbed Hydrofluorocarbons: Theoretical Assessment

2023 · Erik S. Cheng, Gyeong S. Hwang · The Journal of Physical Chemistry C

Formulation of ethanol based Pickering emulsions

2017 · Erik S. Cheng

Works count: 11

Citation count: 55

H-index: 4

I10-index: 2