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Ryota Horiike
Institution:
KOKUSAI ELECTRIC Corporation (Japan)
Observed institution:
KOKUSAI ELECTRIC Corporation (Japan)
ORCID:
0009-0008-3592-3928
Observed ORCID:
0009-0008-3592-3928
OpenAlex ID:
A5065209631
Comparative study of the gas phase reaction of SiCl 4 , SiHCl 3 , SiH 2 Cl 2 , and SiH 3 Cl by thermodynamic analysis
2023
·
Tomoya Nagahashi
, Hajime Karasawa
, et al.
·
Japanese Journal of Applied Physics
·
4
Theoretical study of the gas-phase reaction of hexachlorodisilane by thermodynamic analysis and kinetics calculation
2023
·
Tomoya Nagahashi
, Hajime Karasawa
, et al.
·
Japanese Journal of Applied Physics
·
3
PDF
Silicon-Richness Impact for Enhanced Charge-Trapping in 3-D NAND Flash Memories
2025
·
Tomoya Nagahashi
, Atsushi Oshiyama
, et al.
·
IEEE Journal of the Electron Devices Society
·
1
Optimizing SiN Composition for Enhanced Charge-Trapping in Next-Generation 3D NAND Flash Memories
2025
·
Tomoya Nagahashi
, Hajime Karasawa
, et al.
·
IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
·
1
Theoretical investigation of NH3 nitridation on Cl-terminated Si(100)-2 × 1 surfaces
2024
·
Tomoya Nagahashi
, Hajime Karasawa
, et al.
·
Surface Science
·
1
Corrigendum to “Theoretical investigation of NH3 nitridation on Cl-terminated Si(100)-2 × 1 surfaces” [Surface Science 753 (2025) 122655, p2.]
2024
·
Tomoya Nagahashi
, Hajime Karasawa
, et al.
·
Surface Science
Theoretical Study of the Gas-Phase Reaction of Hexachlorodisilane by Thermodynamic Analysis and Kinetics Calculation
2023
·
Tomoya Nagahashi
, Hajime Karasawa
, et al.
·
International Conference on Solid State Devices and Materials (SSDM)
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Works count:
7
Citation count:
10
H-index:
2
I10-index:
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