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Tomoyuki Nonaka
Institution:
Samco Inc. (Japan)
Observed institutions:
Kyoto Institute of Technology,
Samco Inc. (Japan),
Hitachi (Japan)
ORCID:
0009-0006-7278-1397
Observed ORCID:
0009-0006-7278-1397
OpenAlex ID:
A5066299032
Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel
2023
·
Lianjie Zhou
, Fumihito Kato
, et al.
·
Analytical Chemistry
·
20
PDF
Effects of C4F8 plasma polymerization film on etching profiles in the Bosch process
2023
·
Tomoyuki Nonaka
, Kazuo Takahashi
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
10
Manufacture and performance of blazed soft x-ray transmission gratings for Arcus and Lynx
2021
·
Ralf K. Heilmann
, Alexander R. Bruccoleri
, et al.
·
Optics for EUV, X-Ray, and Gamma-Ray Astronomy
·
7
(Invited) Through Silicon Via (TSV) Process Using DRIE and Cathode Coupled PECVD
2013
·
Yutaka Kusuda
, Tomoyuki Nonaka
, et al.
·
ECS Transactions
·
5
Morphology of films deposited on the sidewall during the Bosch process using C4F8 plasmas
2024
·
Tomoyuki Nonaka
, Kazuo Takahashi
, et al.
·
Journal of Micromechanics and Microengineering
·
4
TSV Processes
2015
·
Masahiko Tanaka
, Makoto Sekine
, et al.
·
Springer eBooks
·
1
System Architecture of H.264/AVC Codec LSI for Digital HD Camcorder
2008
·
Keisuke Inata
, Manabu Sasamoto
, et al.
·
International Conference on Consumer Electronics
·
1
System Architecture of H.264/AVC Codec LSI for Digital HD Camcorder
2008
·
Keisuke Inata
, Manabu Sasamoto
, et al.
·
2008 Second International Conference on Electrical Engineering
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Works count:
8
Citation count:
48
H-index:
4
I10-index:
2
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