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R. Chabane
Observed names:
Chabane, R.,
Rayene Chabane
Institutions:
University Frères Mentouri Constantine 1,
University Mohamed Boudiaf of M'sila
Observed institutions:
University Frères Mentouri Constantine 1,
University Mohamed Boudiaf of M'sila
OpenAlex ID:
A5070287280
CF4 doping effects on SiOF thin films: chemical, structural and dielectric properties in PECVD-deposited films from HMDSO/O2 vapor mixtures
2025
·
R. Chabane
, S. Sahli
, et al.
·
The European Physical Journal B
·
2
PDF
OES Diagnostics of HMDSO/O2/CF4 Microwave Plasma for SiOCxFy Films Deposition
2011
·
Rayene Chabane
, Salah Sahli
, et al.
·
Advanced materials research
·
2
Characterization of SiOF Thin Films Deposited by PECVD from Hexamethyldisiloxane in Mixture with Oxygen and CF4
2009
·
R. Chabane
, Salah Sahli
, et al.
·
Materials science forum
·
1
OES Diagnostics of HMDSO/O2/CF4 Microwave Plasma for SiOCxFy Films Deposition
2010
·
Chabane, R.
, Sahli, S.
, et al.
·
HAL
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Works count:
4
Citation count:
5
H-index:
2
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