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Serguei Kondratenko

Observed names: S. I. Kondratenko, S. Kondratenko, Serguei I. Kondratenko
ORCID: 0009-0006-0462-789X
Observed ORCID: 0009-0006-0462-789X
OpenAlex ID: A5071391876
Enhanced life ion source for germanium and carbon ion implantation
2012 · Tseh-Jen Hsieh, Neil Colvin, et al. · AIP conference proceedings · 9
Analysis of Very High Energy Implantation Profiles at Channeling and Non-Channeling Conditions
2018 · Serguei I. Kondratenko, Leonard M. Rubin, et al. · International Conference on Ion Implantation Technology · 5
Purion XEmax, Axcelis ultra-high energy implanter with Boost™ technology
2023 · Shu Satoh, Wilhelm Platow, et al. · MRS Advances · 4
Beam angle control kit for angle sensitive implantation
2014 · B. Chang, S. Kondratenko, et al. · International Conference on Ion Implantation Technology · 3
Characterization of Boron Contamination in Fluorine Implantation using Boron Trifluoride as a Source Material
2011 · Matthias Schmeide, Serguei Kondratenko, et al. · AIP conference proceedings · 3
Analysis of dopant distribution profiles of very high energy implants
2022 · Serguei Kondratenko, Leonard Rubin · MRS Advances · 2
Damage engineering on Purion XE™ high energy ion implanter
2014 · J. DeLuca, S. Satoh, et al. · International Conference on Ion Implantation Technology · 1
Integration of High Dose Boron Implants—Modification of Device Parametrics through Implant Temperature Control
2011 · Matthias Schmeide, M. S. Ameen, et al. · AIP conference proceedings · 1
Dopant Distribution during Low Energy Implant Anneal Due to Photoresist Breakdown and Anneal Ambient Effects
2005 · Peter M. Kopalidis, Serguei Kondratenko · Journal of The Electrochemical Society · 1
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Channeling effects and quad chain implantation process optimization for low energy boron ions
2002 · S. Kondratenko, R.N. Reece, et al. · International Conference on Ion Implantation Technology · 1
Comparison of arsenic and antimony dopant distribution profiles of very high energy implantations
2025 · Serguei Kondratenko, Leonard Rubin · MRS Advances
Characterization of the beam transmission improvements for p- and n-LDD implantations on a single wafer high current spot beam implanter
2012 · Matthias Schmeide, Serguei Kondratenko, et al. · AIP conference proceedings
Process Performance of Optima XEx Single Wafer High Energy Implanter
2011 · J. H. Kim, Jongyoon Yoon, et al. · AIP conference proceedings
Surface Oxidation Effects During Low Energy BF[sub 2]+] Ion Implantation
2011 · Serguei Kondratenko, Ronald N. Reece, et al. · AIP conference proceedings
A Study of Carbon Effects in Implantation Process for Non-Silicide Contact Formation
2006 · T. H. Huh, S. Kim, et al. · AIP conference proceedings
The Effect of Photoresist Outgassing on Boron Clustering and Diffusion in Low Energy BF2+ Ion Implantation
2004 · Peter Kopalidis, Serguei Kondratenko · MRS Proceedings
Works count: 16
Citation count: 30
H-index: 3
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