Author

Darryl W. Peters

Observed names: D. Peters, D. W. Peters, Darryl Peters, Darryl Wayne Peters, Peters, D. W.

Observed institutions: AT&T (United States), Mars Hill University, NexTalk (United States), DonorConnect, The Ohio State University

OpenAlex ID: A5073772813

Fabrication and testing of 0.1-μm-linewidth microgap x-ray masks

1990 · M. L. Schattenburg, K. Early, et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 13

Temperature dependence of the peak power of a Hänsch-type dye laser

1980 · Darryl W. Peters, C. Weldon Mathews · Applied Optics · 13

Incorporation of Cu Passivators in Post-CMP Cleaners

2007 · Darryl W. Peters · ECS Transactions · 12

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Reduction of CMP-induced wafer defects through in-situ removal of process debris

2011 · S. J. Benner, G. Perez, et al. · ASMC proceedings · 10

Cu Post-CMP Displacement Cleaning: A Mechanistic Product Development Approach Based on Selected Thermodynamic and Kinetic Data

2007 · Darryl Wayne Peters · MRS Proceedings · 10

Excimer Laser Based Lithography: A Deep-Ultraviolet Wafer Stepper For VLSI Processing

1987 · Victor Pol, James H. Bennewitz, et al. · Optical Engineering · 9

Application And Analysis Of Production Suitability Of A Laser-Based Plasma X-Ray Stepper

1988 · Darryl W. Peters, Jerry P. Drumheller, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7

Imaging of contamination on wafers using a scanning surface potential difference measurement technique

2008 · A. Danel, S. Sage, et al. · Microelectronic Engineering · 6

Corrosion and Passivation of Copper

2010 · Darryl W. Peters · Wiley eBooks · 4

Calibration and characterization of a pulsed soft x-ray source

1990 · Darryl W. Peters, Bernard J. Dardzinski, et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 4

Linewidth Control In Trilevel Etching

1987 · Avi Kornblit, Michael J. Grieco, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

Pad surface management as a strategy to reduce the cost of ownership for CMP

2010 · S. J. Benner, G. Perez, et al. · ASMC proceedings · 3

Surface Potential Difference Imaging Applied to Wet Clean Monitoring

2009 · Adrien Danel, S. Sage, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 3

EBES4: performance of a new e-beam reticle generator

1993 · Darryl Peters, D. C. Fowlis, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Preliminary analysis of electron-beam positioning errors in Lepton EBES4

1991 · H. A. Waggener, D. W. Peters, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 3

Defect printability for soft x-ray microlithography

1990 · Darryl Peters, Bernard J. Dardzinski, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Investigation of the Impact of Barrier Slurry Properties on Post-CMP Cleaning Efficiency

2006 · Darryl Peters, Kyle Bartosh, et al. · ECS Meeting Abstracts · 1

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Performance data from the EBES4 high-speed reticle generator

1993 · D. C. Fowlis, Darryl Peters, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Preliminary Testing Results For A New X-Ray Stepper

1989 · Stephen M. Preston, Darryl W. Peters, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Incorporation of Cu Passivators in Post-CMP Cleaners

2007 · Darryl W. Peters · ECS Meeting Abstracts

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Supporting 256-Mb and 1-Gb DRAM mask-making requirements with the Lepton EBES4 e-beam reticle generator

1994 · C. M. Rose, Darryl Peters, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Revolutionary Design Iccp System

1994 · Darryl W. Peters

Dissolution dynamics of soft x-ray exposed novolak resist films

1989 · Darryl W. Peters, Richard J. West · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

The spectroscopy and thermochemistry of Na and Na2

1989 · H. D. McSwiney, Darryl W. Peters, et al. · Journal of Chemical Education

Soft X-Ray Induced Chemical Reactions In Novolak Resist

1989 · Darryl W. Peters, David N. Tomes, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Works count: 31

Citation count: 110

H-index: 7

I10-index: 5