Author

Никита Сергеевич Каранин

Observed names: N. S. Karanin, N.S. Karanin, Nikita Karanin, Nikita S. Karanin, ÐÐ°ÑÐ°Ð½Ð¸Ð½, ÐÐ¸ÐºÐ¸ÑÐ°

Institution: ITMO University

Observed institutions: ITMO University, State Research Center of the Russian Federation

ORCID: 0009-0007-5086-0833

Observed ORCID: 0009-0007-5086-0833

OpenAlex ID: A5075280167

Deep Reactive Ion Etching of Device Layer during Manufacture Micromechanical Accelerometer

2022 · Nikita S. Karanin · IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering · 5

Investigation of Surface Temperature for Sensitive Element of Micromechanical Accelerometer During Plasma Etching Using Finite Element Method

2023 · Nikita Karanin, Olga Yulmetova · Saint Petersburg International Conference on Integrated Navigation Systems · 3

Analytical Method for Calculating the Thickness of Protective Mask Layers in the Manufacturing of a Micromechanical Accelerometer

2025 · N. S. Karanin · Известия высших учебных заведений. Приборостроение

Investigation of geometric parameters of silicon structures in device layer during manufacture of sensitive elements of micromechanical accelerometers

2025 · N. S. Karanin · Scientific and technical journal of information technologies mechanics and optics

Investigation of the Selectivity during Plasma Etching of the Device Layer of Inertial Micromechanical Systems

2024 · N.S. Karanin · Nano- i Mikrosistemnaya Tehnika

Исследование геометрических параметров кремниевых структур в приборном слое при изготовлении чувствительных элементов микромеханических акселерометров

· Никита Сергеевич Каранин · CyberLeninK (CyberLeninka)

Аналитический Метод Расчета Толщины Слоев Защитной Маски При Изготовлении Микромеханического Акселерометра

· Никита Сергеевич Каранин · CyberLeninK (CyberLeninka)

Works count: 9

Citation count: 8

H-index: 2

I10-index: