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Markku Tilli
Observed names:
M Tilli,
M. Tilli,
M. V. Tilli,
M.V. Tilli,
Tilli, Markku
Institution:
Okmetic (Finland)
Observed institutions:
Fritz Haber Institute of the Max Planck Society,
Outokumpu (Sweden),
IMEC,
Okmetic (Finland),
KTH Royal Institute of Technology,
VTT Technical Research Centre of Finland,
Aalto University
show all 7
ORCID:
0000-0001-6953-3153
Observed ORCID:
0000-0001-6953-3153
OpenAlex ID:
A5076429268
Handbook of Silicon Based MEMS Materials and Technologies
2015
·
Tilli, Markku
, Motooka, Teruaki
, et al.
·
Elsevier eBooks
·
265
A 3D micromechanical compass
2007
·
Jukka Kyynäräinen
, Jaakko Saarilahti
, et al.
·
Sensors and Actuators A Physical
·
92
Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Processability
2017
·
Mikael Broas
, Olli Kanninen
, et al.
·
ACS Omega
·
88
PDF
Effect of Chemicals on Metal Contamination on Silicon Wafers
1992
·
O. J. Anttila
, M. V. Tilli
, et al.
·
Journal of The Electrochemical Society
·
33
PDF
Metal Contamination Removal on Silicon Wafers using Dilute Acidic Solutions
1992
·
O. J. Anttila
, M. V. Tilli
·
Journal of The Electrochemical Society
·
26
PDF
Properties of silicon
2020
·
Markku Tilli
, Atte Haapalinna
·
Elsevier eBooks
·
24
Silicon Wafers
2015
·
Markku Tilli
·
Elsevier eBooks
·
24
Silicon wafers preparation and properties
2020
·
Markku Tilli
·
Elsevier eBooks
·
23
Quasi-lifetime topography of magnetic domain movements in grain oriented (100) [001] Fe−3 wt% Si Polycrystals Using White Synchrotron Radiation. The influence of an external magnetic field
1979
·
J. D. Stephenson
, V. Kelhä
, et al.
·
physica status solidi (a)
·
17
“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
2010
·
Sami Franssila
, Santeri Tuomikoski
, et al.
·
16
Properties of Silicon
2015
·
Markku Tilli
, Atte Haapalinna
·
Elsevier eBooks
·
13
Dopant-induced stress in microfabricated silicon devices
2013
·
P. Sievilä
, J. Mäkinen
, et al.
·
Journal of Applied Physics
·
13
Detection of defect-free zones in annealed Czochralski silicon with synchrotron section topography
1985
·
T. Tuomi
, M. Tilli
, et al.
·
Journal of Applied Physics
·
12
3D Micromechanical Compass
2007
·
J. Kyynäräinen
, J. Saarilahti
, et al.
·
Sensor Letters
·
11
Synchrotron topographic study of defects in liquid-encapsulated Czochralski-grown semi-insulating gallium arsenide wafers
1993
·
E. Prieur
, T. Tuomi
, et al.
·
Journal of Crystal Growth
·
11
Thin film backside gettering in n-type (100) Czochralski silicon during simulated CMOS process cycles
1989
·
J. Partanen
, T. Tuomi
, et al.
·
Journal of materials research/Pratt's guide to venture capital sources
·
11
In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2, H2 and vacuum atmospheres
2019
·
Mikael Broas
, Jori Lemettinen
, et al.
·
Thin Solid Films
·
10
PDF
Oxygen Precipitation Studies for N-Type and Epitaxial Silicon Substrates During Simulated Cmos Cycles by Synchrotron Section Topography
1986
·
T. Tuomi
, S. Hahn
, et al.
·
MRS Proceedings
·
8
Pendellösung Fringes in Synchrotron X-Ray Topographs of a Wedge-Shaped Silicon Crystal
1978
·
T. Tuomi
, M. Tilli
, et al.
·
physica status solidi (a)
·
8
Application of synchrotron topography to the study of magnetic domain movements in (100) Fe–3wt% Si produced by a mechanical stress
1979
·
T. Tuomi
, J. D. Stephenson
, et al.
·
physica status solidi (a)
·
7
Properties of Silicon
2010
·
Markku Tilli
, Atte Haapalinna
·
Elsevier eBooks
·
6
Reconstructed topographs of polycrystalline (110) Fe-3 WT % Si samples and the observation of their magnetic domain images using synchrotron radiation
1978
·
J.D. Stephenson
, V. Kelhä
, et al.
·
Nuclear Instruments and Methods
·
6
Silicon Wafers
2010
·
Markku Tilli
·
Elsevier eBooks
·
5
Computer Modelling of the Temperature Distribution in the Silicon Single Crystals During Growth and the Thermal History of the Crystal
1985
·
O. J. Anttila
, M. V. Tilli
, et al.
·
MRS Proceedings
·
5
Quasi-lifetime topography of magnetic domain movements in grain oriented (100) [001] FE–3 wt% Si polycrystals using white synchrotron radiation. II. The influence of small tensile stress
1979
·
J. D. Stephenson
, T. Tuomi
, et al.
·
physica status solidi (a)
·
5
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Works count:
44
Citation count:
759
H-index:
12
I10-index:
17
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