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Katsuyuki Machida

Observed names: K. MACHIDA, K. Machida, KATSUYUKI MACHIDA, Katsuyuki MACHIDA, Katsuyuki Machida Katsuyuki Machida, M. Katsuyuki, Machida Katsuyuki, 克之 町田, 町田 克之, 町田, 克之, 町田克之
Observed institutions: Tokyo Institute of Technology, Toyohashi University of Technology, NTT (Japan), Japan Science and Technology Agency, Centre de Recherche en Économie et Statistique, Institute of Science Tokyo, NTT Advanced Technology Corporation (Japan), NTT Innovative Devices Corporation (Japan), Laboratory for Future Interdisciplinary Research of Science and Technology, Institute of Integrated Research, Institute of Science Tokyo
ORCID: 0000-0002-9706-3475
Observed ORCID: 0000-0002-9706-3475
OpenAlex ID: A5080095206
Design of sub-1g microelectromechanical systems accelerometers
2014 · D. Yamane, T. Konishi, et al. · Applied Physics Letters · 76
A single-chip fingerprint sensor and identifier
1999 · S. Shigematsu, H. Morimura, et al. · IEEE Journal of Solid-State Circuits · 67
Novel Surface Structure and Its Fabrication Process for MEMS Fingerprint Sensor
2005 · N. Sato, S. Shigematsu, et al. · IEEE Transactions on Electron Devices · 63
A novel sensor cell architecture and sensing circuit scheme for capacitive fingerprint sensors
2000 · H. Morimura, S. Shigematsu, et al. · IEEE Journal of Solid-State Circuits · 59
SiO2 planarization technology with biasing and electron cyclotron resonance plasma deposition for submicron interconnections
1986 · Katsuyuki Machida, Hideo Oikawa · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 58
Pulse electroplating of ultra-fine grained Au films with high compressive strength
2016 · Chun-Yi Chen, Masaharu Yoshiba, et al. · Electrochemistry Communications · 47
A novel semiconductor capacitive sensor for a single-chip fingerprint sensor/identifier LSI
2001 · K. Machida, S. Shigematsu, et al. · IEEE Transactions on Electron Devices · 47
Capacitive-Sensing Circuit Technique for Image Quality Improvement on Fingerprint Sensor LSIs
2010 · Toshishige Shimamura, Hiroki Morimura, et al. · IEEE Journal of Solid-State Circuits · 42
MEMS fingerprint sensor immune to various finger surface conditions
2003 · N. Sato, K. Machida, et al. · IEEE Transactions on Electron Devices · 40
Integrated CMOS-MEMS Technology and Its Applications
2014 · Katsuyuki Machida, Toshifumi Konishi, et al. · ECS Transactions · 36
Novel Sensor Structure and Its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer
2013 · Toshifumi Konishi, Daisuke Yamane, et al. · Japanese Journal of Applied Physics · 27
Novel global planarization technology for interlayer dielectrics using spin on glass film transfer and hot pressing
1998 · K. Machida, H. Kyuragi, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 27
A Single-Platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator With Hardware Description Language
2013 · Toshifumi Konishi, Katsuyuki Machida, et al. · Journal of Microelectromechanical Systems · 24
A dual-axis MEMS capacitive inertial sensor with high-density proof mass
2015 · Daisuke Yamane, Takaaki Matsushima, et al. · Microsystem Technologies · 22
Millimeter-wave photonic integrated circuit technologies for high-speed wireless communications applications
2004 · T. Nagatsuma, A. Hirata, et al. · Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference · 22
(Invited) CMOS-MEMS Based Microgravity Sensor and Its Application
2020 · Kazuya Masu, Katsuyuki Machida, et al. · ECS Transactions · 20
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RF CMOS-MEMS Switch with Low-Voltage Operation for Single-Chip RF LSIs
2006 · K. Kuwabara, N. Sato, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 20
Enhanced hot-carrier degradation due to water-related components in TEOS/O/sub 3/ oxide and water blocking with ECR-SiO/sub 2/ film
1993 · N. Shimoyama, K. Machida, et al. · IEEE Transactions on Electron Devices · 20
Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement
2022 · Akira Onishi, Kohei Shibata, et al. · Japanese Journal of Applied Physics · 19
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A electrostatic micromechanical switch for logic operation in multichip modules on Si
2000 · Akihiko Hirata, Katsuyuki Machida, et al. · Sensors and Actuators A Physical · 19
Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices
2017 · Keisuke Asano, Hao-Chun Tang, et al. · Microelectronic Engineering · 18
Impedance-Sensing Circuit Techniques for Integration of a Fraud Detection Function Into a Capacitive Fingerprint Sensor
2011 · Toshishige Shimamura, Hiroki Morimura, et al. · IEEE Sensors Journal · 18
Surface Cleaning of Gold Structure by Annealing during Fabrication of Microelectromechanical System Devices
2009 · Tomomi Sakata, Yuichi Okabe, et al. · Japanese Journal of Applied Physics · 18
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A Fingerprint Sensor with Impedance Sensing for Fraud Detection
2008 · Toshishige Shimamura, Hiroki Morimura, et al. · Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference · 18
A new sensor structure and fabrication process for a single-chip fingerprint sensor/identifier LSI
2003 · K. Machida, S. Shigematsu, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 18
Works count: 1,032
Citation count: 1,860
H-index: 19
I10-index: 61
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