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Author

Sheng-Kai Yeh

Observed institution: National Tsing Hua University
ORCID: 0000-0002-3434-3779
Observed ORCID: 0000-0002-3434-3779
OpenAlex ID: A5080870095
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs
2021 · Ya-Chu Lee, Meng-Lin Hsieh, et al. · Journal of Micromechanics and Microengineering · 43
Inductive Micro Tri-Axial Tactile Sensor Using a CMOS Chip With a Coil Array
2019 · Sheng-Kai Yeh, Weileun Fang · IEEE Electron Device Letters · 35
CMOS-Based Tactile Force Sensor: A Review
2021 · Sheng-Kai Yeh, Meng-Lin Hsieh, et al. · IEEE Sensors Journal · 33
CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement
2020 · Meng-Lin Hsieh, Sheng-Kai Yeh, et al. · Sensors and Actuators A Physical · 28
Development of CMOS MEMS inductive type tactile sensor with the integration of chrome steel ball force interface
2018 · Sheng-Kai Yeh, Heng-Chung Chang, et al. · Journal of Micromechanics and Microengineering · 28
Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement
2020 · Yung-Chian Lin, Ping-Hsiu Hong, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 23
Vertically Integrated Double-Bridge Design for CMOS-MEMS Tri-Axial Piezo-Resistive Force Sensor
2020 · Jia-Horng Lee, Sheng-Kai Yeh, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 19
On the detection interfaces for inductive type tactile sensors
2019 · Sheng-Kai Yeh, Jiunn-Horng Lee, et al. · Sensors and Actuators A Physical · 16
CMOS-MEMS Tri-Axial Piezo-Resistive Tactile Sensor with Monolithically/Vertically Integrated Inductive Proximity Sensor
2019 · Jia-Horng Lee, Sheng-Kai Yeh, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 14
Monolithic/Vertical Integration of Piezo-Resistive Tactile Sensor and Inductive Proximity Sensor Using CMOS-MEMS Technology
2019 · Jia-Horng Lee, Sheng-Kai Yeh, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 14
A Novel CMOS-MEMS Tri-Axial Tactile Force Sensor Using Capacitive and Piezoresistive Sensing Mechanisms
2021 · Yen-Lin Chen, Yu-Cheng Huang, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 12
Vertically Integrated Multiple Electrode Design for Sensitivity Enhancement of CMOS-MEMS Capacitive Tactile Sensor
2019 · Meng-Lin Hsieh, Sheng-Kai Yeh, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 10
Environmental Sensing Hub on Single Chip Using Double-Side Post-CMOS Processes
2020 · Cheng-Chun Chang, Ping-Hsiu Hong, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 8
Development of the Backside Loading Inductive Tactile Force Sensor Using the Flip-Chip Bonding of CMOS Sensing Chip
2019 · Sheng-Kai Yeh, Jiunn-Horng Lee, et al. · IEEE Sensors Journal · 7
Bandwidth and SNR enhancement of MEMS microphones using two poly-Si micromachining processes
2018 · Sung-Cheng Lo, Sheng-Kai Yeh, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 7
Flip-Chip Integration of Inductive CMOS Tactile Sensor with Si Cavity for Polymer-Filler/Metal-Ball Sensing Interface
2019 · Sheng-Kai Yeh, Weileun Fang · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 6
CMOS Chip for Solid-State Tactile Force Sensor
2020 · Sheng-Kai Yeh, Chao-Chun Ning, et al. · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · 5
Integration of Stainless-Steel Tactile Bump with Inductive Tactile Sensor Array for 3D Micro Joystick Button Application
2019 · Sheng-Kai Yeh, Weileun Fang · International Conference on Solid-State Sensors, Actuators and Microsystems · 5
A CMOS-MEMS Electromagnetic-Type Tactile Sensor with Polymer-Filler and Chrome-Steel Ball Sensing Interface
2018 · Sheng-Kai Yeh, Heng-Chung Chang, et al. · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · 5
Molding/Encapsulation/Integration Approach for Tactile-Bump And Sensing-Interface of Inductive Tactile Sensor
2019 · Sheng-Kai Yeh, Weileun Fang · International Conference on Solid-State Sensors, Actuators and Microsystems · 4
A novel polymer filled CMOS-MEMS inductive-type tactile sensor with wireless sensing capability
2017 · Sheng-Kai Yeh, Heng-Chung Chang, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 3
Works count: 21
Citation count: 325
H-index: 11
I10-index: 12
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