Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
Yoshihiro Hirai
Institution:
Tokyo Polytechnic University
Observed institution:
Tokyo Polytechnic University
OpenAlex ID:
A5081237489
Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium
2020
·
Keizo Tsukamoto
, Tetsuro Tamura
, et al.
·
Japanese Journal of Applied Physics
·
8
Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
2021
·
Masaomi Sanekata
, Hiroshi Nishida
, et al.
·
Plasma
·
6
PDF
Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)
2021
·
Masaomi Sanekata
, Hiroshi Nishida
, et al.
·
Plasma
·
5
PDF
Discharge Time Analysis in High Power Pulsed Magnetron Sputtering
2021
·
Masaomi Sanekata
, Hiroshi NISHIDA
, et al.
·
The Japan Society of Applied Physics
Show more works
View as search
Works count:
4
Citation count:
19
H-index:
3
I10-index:
Year
Topic
Type
