Author

E. Lahmar

Institution: Centre de Développement des Technologies Avancées

Observed institution: Centre de Développement des Technologies Avancées

OpenAlex ID: A5081680112

Effects Of Pressure And Power On The Ionic Saturation Current And Self-Bias Voltage In A RF Discharge 13.56 MHz Of (SF[sub 6], O[sub 2]) At Low Pressure

2008 · M. M. Alim, M. Zekara, et al. · AIP conference proceedings

Works count: 1

Citation count:

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