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Stephan Görsch
Observed name:
Stephan GORSCH
Institution:
Leibniz Institute of Surface Engineering
Observed institution:
Leibniz Institute of Surface Engineering
ORCID:
0009-0009-0573-3821
Observed ORCID:
0009-0009-0573-3821
OpenAlex ID:
A5084663147
Ion Beam Figuring (IBF) Solutions for High Performance Optics Surface Finishing from Meter to Millimeter Spatial Wavelength Range(Advances in non-traditional machining)
2005
·
Axel SCHINDLER
, Thomas HANSEL
, et al.
·
Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21
·
2
PDF
Tuning of width to period ratio of synchrotron gratings by reactive ion beam etching
2026
·
Stephan Görsch
, Frank Frost
, et al.
·
Surface and Coatings Technology
·
1
Generation of homogeneous removal profile by sample rotation using a broad beam ion source
2026
·
Stephan Görsch
, Andreas Nickel
, et al.
·
Journal of Physics D Applied Physics
·
1
Manufacturing of blazed gratings in silicon using new RIBE approaches
2026
·
Gregor Dornberg
, Annemarie Finzel
, et al.
·
EPJ Web of Conferences
Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
2019
·
Annemarie Finzel
, Gregor Dornberg
, et al.
·
EPJ Web of Conferences
PDF
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Works count:
5
Citation count:
4
H-index:
1
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