Get started
Author

Kotaro Takijiri

Observed names: Kotaro TAKIJIRI, タキジリ, コウタロウ
Institution: Horiba STEC (Japan)
ORCID: 0009-0003-8626-9333
Observed ORCID: 0009-0003-8626-9333
OpenAlex ID: A5085621713
Mass flow control using estimated output feedback in semiconductor processes
2025 · Kotaro Takijiri, Kazuki Nakata, et al. · Mechatronics · 5
PI gain tuning for pressure-based MFCs with Gaussian mixture model
2024 · Seiji Higuchi, Takayuki Ueda, et al. · Scientific Reports · 3
PDF
Wafer Temperature Control Using Helium Pressure and Observer-Based Model Predictive Control
2023 · Daisuke Hayashi, Kotaro Takijiri, et al. · ASME Letters in Dynamic Systems and Control · 2
Pressure Control for Semiconductor Processes Based on Estimated Output Feedback
2022 · Kotaro TAKIJIRI, Koichi OSUKA, et al. · Transactions of the Society of Instrument and Control Engineers · 1
PDF
Compensation of Pressure Disturbance for Flow Control Equipment without Pressure Sensor by Disturbance Model and IMC
2020 · Kotaro TAKIJIRI, Yukio SAKAI, et al. · Transactions of the Society of Instrument and Control Engineers · 1
PDF
Multi-physical Domain Modeling of Constant Temperature Flow Sensor
2019 · Kotaro TAKIJIRI, Yukio SAKAI, et al. · Transactions of the Society of Instrument and Control Engineers · 1
PDF
High speed response of liquid mass flow controller in direct liquid injection by observer-based control
2026 · Chihiro Hamada, Daisuke Hayashi, et al. · Mechatronics
Proposal of Flow Split Controller and Control Parameter Optimization for Semiconductor Manufacturing Process
2022 · Kotaro TAKIJIRI, Koichi OSUKA, et al. · Transactions of the Society of Instrument and Control Engineers
Works count: 9
Citation count: 13
H-index: 2
I10-index:
Year
Topic
Type