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John Carroll
Observed names:
Carroll, John,
J. Carroll
Institution:
Tokyo Electron (Japan)
Observed institution:
Tokyo Electron (Japan)
ORCID:
0000-0002-6953-5500
Observed ORCID:
0000-0002-6953-5500
OpenAlex ID:
A5085849664
Characterization of neutral species in an NH3-Ar plasma generated by a capacitively coupled plasma source at various radio frequencies
2023
·
S. M. Johnson
, J. P. Zhao
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
3
Plasma enhanced atomic layer deposition of silicon nitride and silicon carbonitride using a single source precursor and different plasmas
2025
·
Samuel M. Johnson
, Jianping Zhao
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
1
Measurements and Simulations of Hydroxyl Radical Production in Ar-H2O Capacitively Coupled Plasmas
2026
·
Danil Dobrynin
, Kristofer Ohlinger
, et al.
·
IEEE International Conference on Plasma Science (ICOPS)
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Works count:
4
Citation count:
4
H-index:
1
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