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Sara Harris
Institution:
Forge Nano (United States)
Observed institution:
Forge Nano (United States)
ORCID:
0009-0000-9164-3957
Observed ORCID:
0009-0000-9164-3957
OpenAlex ID:
A5086589044
Improved Uniformity in Glass TSV Filling by Asymmetric Dwell Pulsed Potential Deposition
2026
·
Youjung Kim
, Eunsoo Shim
, et al.
·
Journal of The Electrochemical Society
·
2
PDF
Controlled phosphate doping into nanoscopic SiO2 proton conducting membranes
2025
·
Matthew S. Weimer
, Sara Harris
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
1
Low Resistivity Metallic Films by Thermal Atomic Layer Deposition for High Aspect-Ratio Interconnects
2024
·
Matthew Weimer
, Irina Stateikina
, et al.
·
ECS Meeting Abstracts
·
1
The Hydrogen Effect: Probing Silicon Bonding and Barrier Integrity in MEMS via STEM–EELS
2026
·
Rosa E Díaz
, Meera Vikas Garud
, et al.
·
Microscopy and Microanalysis
Enabling High Aspect-Ratio Interconnects for Advanced Packaging of MEMS and Sensors
2025
·
Matt Weimer
, Irina Stateikina
, et al.
·
IMAPSource Proceedings
PDF
Low-Resistivity Thermal Titanium Nitride ALD for Conductive Layers in Advanced Packaging and Microbatteries
2025
·
Matthew S Weimer
, Dane Lindblad
, et al.
·
ECS Meeting Abstracts
Tailoring Dielectric Atomic Layer Deposition Films for UWBG Semiconductors: Performance and Uniformity at Production Scale
2025
·
Matthew Weimer
, Sara Harris
, et al.
·
IEEE Workshop on Wide Bandgap Power Devices and Applications
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Works count:
7
Citation count:
4
H-index:
1
I10-index:
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