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Thorsten Last

Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner
2017 · Mark van de Kerkhof, Hans Jasper, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 89
Multi-component based cross correlation beat detection in electrocardiogram analysis
2004 · Thorsten Last, Chris D Nugent, et al. · BioMedical Engineering OnLine · 54
Mitigation of mask three-dimensional induced phase effects by absorber optimization in ArFi and extreme ultraviolet lithography
2016 · Jo Finders, Laurens de Winter, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 45
Contrast optimization for 0.33NA EUV lithography
2016 · Jo Finders, Sander Wuister, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 33
Accelerating quantum computer developments
2021 · Garrelt J. N. Alberts, M. Adriaan Rol, et al. · EPJ Quantum Technology · 30
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Quantum Inspire: QuTech’s platform for co-development and collaboration in quantum computing
2020 · Thorsten Last, Nodar Samkharadze, et al. · SPIE Novel Patterning Technologies · 24
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Imaging enhancement by reduction of mask topography induced phase aberrations for horizontal 1D spaces under D90Y illumination
2015 · T. Last, L. de Winter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 15
Understanding the litho-impact of phase due to 3D mask effects when using off-axis illumination
2015 · L. de Winter, T. Last, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 15
Illumination pupil optimization in 0.33-NA extreme ultraviolet lithography by intensity balancing for semi-isolated dark field two-bar M1 building blocks
2016 · Thorsten Last, Laurens de Winter, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 12
N7 dark field two-bar in 0.33NA EUVL: Mitigation of CD Bossung tilts caused by strong coupling between the feature's primary and 1st self-image
2017 · T. Last, P. van Adrichem, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 10
Anamorphic imaging at high-NA EUV: mask error factor and interaction between demagnification and lithographic metrics
2016 · Gerardo Bottiglieri, Thorsten Last, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Experimental verification of AI decomposition-based source optimization for M1 two-bar building blocks in 0.33NA EUVL
2016 · T. Last, Z. Wang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Illumination pupil optimization in 0.33NA EUVL by intensity balancing for semi-iso dark field two-bar M1 building blocks
2016 · T. Last, L. de Winter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Key ingredients for manufacturing superconducting quantum processors at scale
2023 · Thorsten Last, Massimo Mongillo, et al. · SPIE Novel Patterning Technologies · 5
Evaluation of electrocardiogram beat detection algorithms: patient specific versus generic training
2007 · Thorsten Last, Chris D Nugent, et al. · Conference proceedings · 4
Single-qubit randomized benchmarking of flux-tuneable transmons: a test time analysis
2024 · Thorsten Last, Yevheniia Cheipesh, et al. · Metrology, Inspection, and Process Control XXXVI · 1
Evaluation of multi-component Electrocardiogram beat detection algorithms: Implications of three different noise artifacts
2007 · T. Last, C.D. Nugent, et al. · Computers in cardiology · 1
Novel approaches in high throughput testing and overhead reduction such as global control to narrow the gap to quantum advantage
2025 · Thorsten Last, Sibasish Mishra, et al. · SPIE Photomask Technology Conference
Combination of multi-component and single-component based electrocardiogram beat detection algorithms
2010 · T. Last, C.D. Nugent, et al. · International Journal of Biomedical Engineering and Technology
Works count: 19
Citation count: 360
H-index: 10
I10-index: 10
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