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Roshan J. Tirukkonda

Observed name: Roshan Tirukkonda
Observed institution: Western Digital (United States)
ORCID: 0009-0003-2041-0912
Observed ORCID: 0009-0003-2041-0912
OpenAlex ID: A5092116731
Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling
2023 · Roshan J. Tirukkonda, Mark D. Kraman, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 6
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks
2023 · Prafful Golani, Roshan J. Tirukkonda, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 4
Extending area selective deposition of ruthenium onto 3D SiO2-Si multilayer stacks
2023 · Kartik Sondhi, Rahul Sharangpani, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 4
Works count: 3
Citation count: 14
H-index: 3
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