Author

Kenta Doi

Observed names: K Doi, K. Doi, Kenta DOI

Observed institutions: Doshisha University, National Institute for Fusion Science, Ulvac (Japan), The University of Tokyo

ORCID: 0000-0002-7710-5711

Observed ORCID: 0000-0002-7710-5711

OpenAlex ID: A5101503561

A novel plasma etching technology of RIE-lag free TSV and dicing processes for 3D chiplets interconnect

2024 · Taichi Suzuki, Kenta Doi, et al. · IEEE Electronic Components and Technology Conference (ECTC) · 8

Impact due to impurity contamination upon Cs consumption of a negative hydrogen ion source

2017 · M. Wada, K. Doi, et al. · AIP conference proceedings · 8

Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation

2023 · Yuya Yamashita, Kenta Doi, et al. · Review of Scientific Instruments · 7

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Spectroscopy Study of Hydrogen Atoms Reflected From Tungsten Surface in a Magnetized Plasma

2018 · Kenta Doi, Hitoshi Yamaoka, et al. · IEEE Transactions on Plasma Science · 7

Spectroscopic study of hydrogen reflection at modified tungsten surface

2018 · Kenta Doi, Heun Tae Lee, et al. · Fusion Engineering and Design · 7

Reflection properties of hydrogen ions at helium irradiated tungsten surfaces

2016 · K Doi, Y Tawada, et al. · Physica Scripta · 6

Polyimide Fine via and Trench Formation Based on Plasma Etching Technology for RDL Interposer

2025 · Fumito Ootake, Kenta Doi, et al. · IEEE Electronic Components and Technology Conference (ECTC) · 3

Doppler shift measurement of Balmer-alpha line spectrum emission from a plasma in a negative hydrogen ion source

2015 · M. Wada, K. Doi, et al. · AIP conference proceedings · 3

A Compact Planar Magnetron Plasma Sputtering Device for TiO2 Deposition

2013 · Michelle Marie S. Villamayor, Kenta Doi, et al. · MRS Proceedings · 2

Plasma Excitation in a DC Linear Magnetic Field by a Duoplasmatron Plasma Cathode

2020 · Jhoelle Roche M. GUHIT, Arnold Rey B. GINES, et al. · Plasma and Fusion Research · 1

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Optimizing Uniformity of Fluxes to Wafers in SF 6 / O 2 /SiF 4 Inductively Coupled Plasmas Using Multiple Antennas

2026 · Maryam Khaji, Fatima Arellano, et al. · IEEE International Conference on Plasma Science (ICOPS)

Multiple solutions in the T e – N e parameter space of argon CR model via Monte Carlo optimization

2026 · Yuchen Ye, Kenta Doi, et al. · Plasma Sources Science and Technology

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Spectroscopic investigation of molecular species in hydrogen plasma near palladium and tungsten surfaces

2019 · Jhoelle Mendiola Guhit, Kenta Doi, et al. · Institutional Repositories DataBase (IRDB)

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Investigation of Impact of Negative Ions on the Hydrogen Plasma Characteristics on Metal Targets

2019 · Jhoelle Mendiola Guhit, Kenta Doi, et al. · The Japan Society of Applied Physics

Effect of Substrate Temperature on the Hydrogen Reflection at Metal Surfaces

2019 · Jhoelle Roche M. GUHIT, Kenta DOI, et al. · Plasma and Fusion Research

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Bubble formation on plasma irradiated tungsten surface

2018 · ArnoldRey Burgos Gines, Kenta Doi, et al. · The Japan Society of Applied Physics

Spectroscopic Study of Hydrogen Reflection from Palladium Surface Immersed in a Magnetized Hydrogen Plasma

2018 · Jhoelle Mendiola Guhit, Kenta Doi, et al. · The Japan Society of Applied Physics

Spectroscopy study of hydrogen particle reflection at helium-induced fuzzy tungsten surface

2018 · 謙太土居, Kenta Doi · Institutional Repositories DataBase (IRDB)

Spectroscopic study of hydrogen reflection at a plasma bombarded tungsten surface

2017 · Kenta Doi · Plasma Conference

Spectroscopic study of molecular hydrogen concentration at the vicinity of metal surfaces

2017 · Kenta Doi, Mamiko Sasao, et al. · AIP conference proceedings

Negative ion formation by proton reflection from a molybdenum surface at a shallow incidence angle

2017 · M. Sasao, T. Kanazawa, et al. · AIP conference proceedings

Reflection Properties of Hydrogen Ions at Helium Irradiated Tungsten Surfaces

2016 · H. Yamaoka, Kenta Doi, et al. · Annual report of National Institute for Fusion Science/Annual report

A Compact Planar Magnetron Plasma Sputtering Device for TiO2 Deposition – ERRATUM

2014 · Michelle Marie S. Villamayor, Kenta Doi, et al. · MRS Proceedings

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Works count: 23

Citation count: 52

H-index: 6

I10-index: