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Oleg A. Popov

Observed names: O A Popov, O. A. Popov, O.A. Popov, OLEG A. POPOV, Oleg A Popov, Oleg Popov, Попов [Popov], Олег [Oleg] Алексеевич [A.]
ORCID: 0000-0002-2453-9452
Observed ORCID: 0000-0002-2453-9452
OpenAlex ID: A5101874544
Power dissipated in low-pressure radio-frequency discharge plasmas
1985 · O. A. Popov, V. A. Godyak · Journal of Applied Physics · 149
Characteristics of electron cyclotron resonance plasma sources
1989 · O. A. Popov · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 89
High Density Plasma Sources: Design, Physics and Performance
1996 · Oleg A. Popov · 72
Silicon nitride formation from a silane–nitrogen electron cyclotron resonance plasma
1991 · J. C. Barbour, H. J. Stein, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 64
Electron cyclotron resonance plasma chemical vapor deposition of large area uniform silicon nitride films
1991 · S. Y. Shapoval, V. T. Petrashov, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 38
Electron cyclotron resonance plasmas excited by rectangular and circular microwave modes
1990 · Oleg A. Popov · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 28
Characteristics of electrodeless ferrite-free fluorescent lamp operated at frequencies of 1-15 MHz
2000 · Oleg Popov, Jakob Maya · Plasma Sources Science and Technology · 18
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Electron Cyclotron Resonance Plasma Sources and Their Use in Plasma-Assisted Chemical Vapor Deposition of Thin Films
1994 · OLEG A. POPOV · Physics of thin films · 17
Characterization of electronic and optical properties of device quality a-Si:H and a-(Si,Ge):H grown by remote plasma electron cyclotron resonance deposition
1991 · R. D. Knox, V. L. Dalal, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 17
Ferrite-free high power electrodeless fluorescent lamp operated at a frequency of 160-l000 kHz
2002 · Oleg A Popov, Robert Chandler · Plasma Sources Science and Technology · 12
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Electron cyclotron resonance plasma source for metalorganic chemical vapor deposition of silicon oxide films
1994 · O. A. Popov, S. Y. Shapoval, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 12
An electron cyclotron resonance plasma stream source for low pressure thin film production
1988 · O.A. Popov · Surface and Coatings Technology · 12
Experimental study of resonant RF discharges
1979 · V. A. Godiak, Oleg A. Popov · Sov. J. Plasma Phys. (Engl. Transl.); (United States) · 8
Characteristics of an 8-cm-diam electron cyclotron resonance source for plasma processing
1992 · Oleg A. Popov, August O. Westner, et al. · Review of Scientific Instruments · 6
Electron oscillation velocity and electric field in collisionless radio-frequency discharge plasmas
1986 · O. A. Popov, V. A. Godyak · Journal of Applied Physics · 6
A 200–500-W transformer-type inductive light source operated at a frequency of 150–400 kHz
2007 · O. A. Popov, R. T. Chandler · High Temperature · 4
Uniform linear arrays of strained-layer InGaAs-AlGaAs quantum-well ridge-waveguide diode lasers fabricated by ECR-IBAE
1995 · J.D. Woodhouse, C.A. Wang, et al. · IEEE Journal of Quantum Electronics · 4
Electrodeless Source of UV Radiation Based on Low-Pressure Microwave Mercury Discharge
2023 · Igor I. Zheleznov, Oleg A. Popov · Light & Engineering · 3
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Electrodeless UV Lamp on the Basis of Low-Pressure Mercury Discharge in a Closed Non-Ferrite Tube
2019 · Pavel V. Starshinov, Oleg A. Popov, et al. · Light & Engineering · 3
A compact electron cyclotron resonance source for 200-2000 eV ion beams
1994 · O A Popov, A O Westner · Plasma Sources Science and Technology · 3
Microwave plasma source for remote low energy ion stream
1990 · Oleg A. Popov, William Hale, et al. · Review of Scientific Instruments · 3
Studying the Radiative and Spectral Characteristics of UV Radiation Sources Based on Coaxial Microwave Discharges in Low-pressure Mercury Vapor
2023 · Igor Zheleznov, Oleg Popov · Vestnik MEI · 2
Ferrite-free closed-loop inductively-coupled low mercury pressure UV lamp
2020 · Oleg A Popov, Pavel V Starshinov, et al. · Plasma Research Express · 2
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Testing and Analysis of Characteristics of Low-Pressure Mercury and Amalgam Bactericidal UV Lamps by Various Manufacturers
2019 · Michael E. Allash, Leonid M. Vasilyak, et al. · Light & Engineering · 2
ElectrodeLess FerriteFree ClosedLoop InductivelyCoupled Fluorescent Lamp
2018 · Oleg A. Popov, Pavel V. Starshinov, et al. · Light & Engineering · 2
Works count: 43
Citation count: 581
H-index: 12
I10-index: 12
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