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Stephen A. Campbell

Observed names: Campbell, S. A., S A Campbell, S. A. CAMPBELL, S. A. Campbell, S.A Campbell, S.A. Campbell, S. A. Campbell, Stephen A Campbell, Stephen Campbell
ORCID: 0000-0002-0702-5134
Observed ORCID: 0000-0002-0702-5134
OpenAlex ID: A5102739816
MOSFET transistors fabricated with high permitivity TiO/sub 2/ dielectrics
1997 · S.A. Campbell, D.C. Gilmer, et al. · IEEE Transactions on Electron Devices · 401
Imaging and phase identification of Cu2ZnSnS4 thin films using confocal Raman spectroscopy
2011 · A.-J. Cheng, M. Manno, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 249
Titanium dioxide (TiO2)-based gate insulators
1999 · S. A. Campbell, H.-S. Kim, et al. · IBM Journal of Research and Development · 246
Doping efficiency, dopant location, and oxidation of Si nanocrystals
2008 · X. D. Pi, R. Gresback, et al. · Applied Physics Letters · 206
Does Chemistry Really Matter in the Chemical Vapor Deposition of Titanium Dioxide? Precursor and Kinetic Effects on the Microstructure of Polycrystalline Films
1999 · Charles J. Taylor, David C. Gilmer, et al. · Journal of the American Chemical Society · 148
Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high-k materials in microelectronic devices. A carbon-free precursor for the synthesis of hafnium dioxide
2000 · Ryan C. Smith, Tiezhong Ma, et al. · Advanced Materials for Optics and Electronics · 147
Air-stable full-visible-spectrum emission from silicon nanocrystals synthesized by an all-gas-phase plasma approach
2008 · X D Pi, R W Liptak, et al. · Nanotechnology · 146
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Fabrication Engineering at the Micro and Nanoscale
2007 · Stephen A. Campbell · 114
Room-temperature atmospheric oxidation of Si nanocrystals after HF etching
2007 · X. D. Pi, L. Mangolini, et al. · Physical Review B · 114
Revealing the Origins of 3D Anisotropic Thermal Conductivities of Black Phosphorus
2016 · Jie Zhu, Haechan Park, et al. · Advanced Electronic Materials · 108
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Structural and electrical characterization of TiO2 grown from titanium tetrakis-isopropoxide (TTIP) and TTIP/H2O ambients
1996 · J. Yan, D. C. Gilmer, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 95
A study of mixtures of HfO2 and TiO2 as high-k gate dielectrics
2004 · F. Chen, X. Bin, et al. · Microelectronic Engineering · 90
Anhydrous Metal Nitrates as Volatile Single Source Precursors for the CVD of Metal Oxide Films
1998 · Daniel G. Colombo, David C. Gilmer, et al. · Chemical Vapor Deposition · 88
Controlled p-type substitutional doping in large-area monolayer WSe 2 crystals grown by chemical vapor deposition
2018 · Sushil Kumar Pandey, Hussain Alsalman, et al. · Nanoscale · 87
Steady-state thermal uniformity and gas flow patterns in a rapid thermal processing chamber
1991 · S.A. Campbell, K.-H. Ahn, et al. · IEEE Transactions on Semiconductor Manufacturing · 72
A plasma process for the synthesis of cubic-shaped silicon nanocrystals for nanoelectronic devices
2007 · Ameya Bapat, Marco Gatti, et al. · Journal of Physics D Applied Physics · 61
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Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates
2001 · Tiezhong Ma, S.A. Campbell, et al. · IEEE Transactions on Electron Devices · 57
An experimental and numerical study of particle nucleation and growth during low-pressure thermal decomposition of silane
2003 · Sandeep Nijhawan, Peter H McMurry, et al. · Journal of Aerosol Science · 55
Formation of highly uniform silicon nanoparticles in high density silane plasmas
2003 · Z. Shen, T. Kim, et al. · Journal of Applied Physics · 51
Low Temperature CVD of Crystalline Titanium Dioxide Films Using Tetranitratotitanium( IV
1998 · David C. Gilmer, Daniel G. Colombo, et al. · Chemical Vapor Deposition · 50
Single nanoparticle semiconductor devices
2006 · Yongping Ding, Ying Dong, et al. · IEEE Transactions on Electron Devices · 49
High mobility HfO2 n- and p-channel transistors
2001 · S.A Campbell, T.Z Ma, et al. · Microelectronic Engineering · 47
An analysis of temperature dependent current–voltage characteristics of Cu2O–ZnO heterojunction solar cells
2011 · SeongHo Jeong, Sang Ho Song, et al. · Thin Solid Films · 46
Atomic Layer Deposition, Characterization, and Dielectric Properties of HfO2/SiO2 Nanolaminates and Comparisons with Their Homogeneous Mixtures
2006 · L. Zhong, W. L. Daniel, et al. · Chemical Vapor Deposition · 43
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Electroluminescence from surface oxidized silicon nanoparticles dispersed within a polymer matrix
2007 · Rebekah K. Ligman, Lorenzo Mangolini, et al. · Applied Physics Letters · 41
Works count: 189
Citation count: 4,157
H-index: 34
I10-index: 69
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