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K. Kühl
Observed names:
K. Kuhl,
Kristin E. J. Kühl,
Kühl, K.,
Kühl, Kristin E. J.
Institution:
Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau
Observed institutions:
Fraunhofer Institute for Microelectronic Circuits and Systems,
Fraunhofer Research Institution for Microsystems and Solid State Technologies,
Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau,
Fraunhofer-Gesellschaft
ORCID:
0009-0008-1200-6326
Observed ORCID:
0009-0008-1200-6326
OpenAlex ID:
A5111033694
Fabrication of Non‐Underetched Convex Corners in Anisotropic Etching of (100)‐Silicon in Aqueous KOH with Respect to Novel Micromechanic Elements
1990
·
G. K. Mayer
, H. L. Offereins
, et al.
·
Journal of The Electrochemical Society
·
117
PDF
A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges
1993
·
H. Sandmaier
, K. Kuhl
·
IEEE Transactions on Electron Devices
·
96
Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH
1990
·
H.L. Offereins
, K. Kühl
, et al.
·
Sensors and Actuators A Physical
·
78
Amorphous silicon carbide and its application in silicon micromachining
1994
·
A. Klumpp
, U. Schaber
, et al.
·
Sensors and Actuators A Physical
·
55
Corner compensation techniques in anisotropic etching of
1991
·
H. Sandmaier
, H.L. Offereins
, et al.
·
International Conference on Solid-State Sensors, Actuators and Microsystems
·
25
Absorbing layers for thermal infrared detectors
1991
·
W. Lang
, K. Kuhl
, et al.
·
International Conference on Solid-State Sensors, Actuators and Microsystems
·
21
A thin-film bolometer for radiation thermometry at ambient temperature
1990
·
W. Lang
, K. Kühl
, et al.
·
Sensors and Actuators A Physical
·
20
Anisotropic etching for optical gratings
1995
·
A. Klumpp
, K. Kühl
, et al.
·
Sensors and Actuators A Physical
·
10
Piezoresistive low-pressure sensor with high sensitivity and high accuracy
1990
·
H. Sandmaier
, K. Kühl
·
Sensors and Actuators A Physical
·
10
Batch Fabrication of Silicon Micropumps
2001
·
M. Richter
, J. Kruckow
, et al.
·
Springer eBooks
·
9
Stress Compensation Techniques in Thin Layers Applied to Silicon Micromachining
1992
·
W. Lang
, G. Mük
, et al.
·
MRS Proceedings
·
3
Herstellung und Charakterisierung von metallischen Mikrostrukturen mit magnetischen Eigenschaften
2026
·
Kühl, Kristin E. J.
·
Publication Server of Kaiserslautern University of Technology (Kaiserslautern University of Technology)
Direct Laser Writing of Ferromagnetic Nickel Utilizing the Principle of Sensitized Triplet–Triplet Annihilation Upconversion
2026
·
Kristin E. J. Kühl
, Katharina Rediger
, et al.
·
ACS Applied Materials & Interfaces
PDF
Anisotropic etching for optical gratings
1996
·
A. Klumpp
, K. Kühl
, et al.
·
Elsevier eBooks
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Works count:
17
Citation count:
444
H-index:
9
I10-index:
9
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